Vacuum Chamber Cleaning - ScrubWRIGHT

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Datasheet

A unique tool for cleaning small, hard to reach areas. Interchangeable belt-shaped Diamond ScrubBELTS® in various grits create a versatile instrument perfect for polishing stains, scratches and process-induced residue from scratch sensitive surfaces. Spring adjustable for easy mounting and rotation of ScrubWRIGHTTM ScrubBELT®.

ADVANTAGES

  • Improved Cost Of Ownership “COO”
  • Helps Reduce Particles
  • Safely Removes Deposition From Sensitive Areas
  • Reduces Damage To Critical Parts
  • Ideal to clean and polish O-Ring grooves and sealing surfaces
Current Tools used to PM Vacuum Systems result in particle defects and damage to critical surfaces. ScrubWRIGHTTM enables improved safety and reduced particles for PM's of Vacuum System components and surfaces.

Click here to view Scotch-Brite™ vs. ScrubPAD video.

To Clean or not to Clean is often the question. ScrubWRIGHTTM makes the cleaning of ESC's, Heater Pedestals, Shower Heads,Vacuum Sealing Surfaces and other sensitive components easy and safe.

ScrubWRIGHTTM Applications

Press Release

ScrubWRIGHTTM LAM ESC Applications

Scotch-Brite™ is a trademark of 3M Corporation