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Boosting AMAT *Producer Performance with Foamtec’s RPS Cleaning Kit

by | Feb 27, 2024


In the ever-evolving world of semiconductor manufacturing, where precision and cleanliness are paramount, maintaining the performance and uptime of your equipment is crucial. Advanced machines like Applied Materials (AMAT) Chemical Vapor Deposition (CVD) tools require meticulous attention to detail to ensure they function optimally. One common challenge faced by semiconductor manufacturers is the persistent issue of film particle residues, affecting the tool’s performance and necessitating frequent downtime for cleaning. Fortunately, Foamtec’s innovative RPS Cleaning Kit offers an effective solution to these problems, allowing you to enhance the efficiency of your AMAT *Producer while minimizing downtime.

The Problem: Inadequate Cleaning Methods

Traditionally, the cleaning process for the MKS Remote Plasma Source (RPS) unit attached to AMAT’s *Producer CVD tool involved using a wiper saturated with deionized (DI) water and a flexible grabber claw pick-up tool to clean both the inlet and outlet of the RPS. Subsequently, an N2 gun is used for about 5 minutes at both the inlet and outlet of the RPS area to remove any remaining particles.

However, this standard procedure often fails to effectively remove AlF3 film particles, leading to subpar particle performance and the need for frequent RPS unit cleaning. This not only impacts the overall tool performance but also results in increased downtime, which can have adverse effects on your production schedule and profitability.

The Solution: Foamtec’s HT4500-RPS23 Cleaning Kit

Foamtec has stepped up to address these challenges with its specially designed RPS Cleaning Kit, which offers a more effective and comprehensive cleaning solution for AMAT *Producer CVD tools.

This kit comprises several vital components that work in harmony to ensure superior cleaning results:

Flexible Tips Swab: This swab is lightly dampened with DI water and used to clean the RPS unit. It significantly reduces black particle levels, ensuring a thorough cleaning process.
Linear Mira Sponge Cleaner: This component removes particles from the edge and RPS ignitor, thoroughly cleaning even hard-to-reach areas.
MiraWIPE with String: The MiraWIPE is the final step in the cleaning process. It is designed to eliminate any remaining particles, leaving your RPS unit spotless and ready for action.

How It Works

Implementing Foamtec’s RPS Cleaning Kit is a straightforward process that can significantly enhance the efficiency of your cleaning routine:

Step 1: Use the Flexible Tips Swab to clean the RPS unit, effectively removing any stubborn particle residues.

Step 2: Follow up with the Linear Mira Sponge Cleaner to tackle particles in the edge and RPS ignitor areas, leaving no room for contaminants to linger.

Step 3: Finish the cleaning process with the MiraWIPE with String, ensuring that any last traces of particles are eliminated.

Step 4: To complete the cleaning process, use an N2 gun to blow into the inlet and outlet of the RPS area for approximately 3-5 minutes. This step ensures thorough drying and removes any lingering moisture that could attract new contaminants.

In conclusion, Foamtec’s RPS Cleaning Kit offers a superior solution for enhancing the performance and uptime of your AMAT *Producer CVD tools. By replacing the traditional, less effective cleaning methods with Foamtec’s specialized tools, you can effectively address particle-related issues, improve particle performance, and reduce the need for frequent RPS unit cleaning. This boosts your tool’s overall performance and minimizes downtime, leading to increased productivity and profitability in semiconductor manufacturing. Make the smart choice today and elevate your AMAT *Producer’s performance with Foamtec’s RPS Cleaning Kit.

*Producer is a registered trademark of Applied Materials, Inc.

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