Application Notes

The Foamtec LLC Sales/Application Engineering Staff has worked closely with the leading Tool Manufacturers and Wafer Fab Professionals, to develop a High Precision PM Technique that drives improved tool performance and reduced cost of ownership. Our fab experience and working directly with our customers allowed us to develop tools used for many different special applications to help meet their objectives. We have a world wide network of factory trained engineers to support our customers

.If you would like to request an Application Note (or further information) for a specific tool or practice that is not available below, please click here to send us an e-mail. Please be sure to include your name, company name, phone number and tool type. One of our sales engineers will contact you in a timely manner to assist you with the information you require.

• Print Room Cleaning Technique (PDF)
• Thick-Film/Solder Paste/Ink Mixing Equipment Clean Application Note (PDF)
• HazMat Reduction (PDF)
• A Wiper, Solvent and HazMat Reduction Solution (PDF )
• Three Roll Mill Clean (PDF)
  
  

• Alcatel 2460 Process Chamber Application Note (PDF)
• AMAT 200MM DPS Chamber Application Note (PDF)
• AMAT 200MM HDP Chamber Scrub (PDF)
• AMAT 200MM HDP Dome Scrub Application Note (PDF)
• AMAT Centura 5200 Etch Chamber PM (PDF)
• AMAT CMP Tungsten and Oxide Slurry Clean (PDF)
• AMAT Endura CVD/PVD Lid Clean (PDF)
• AMAT Endura PVD DeGas Chamber Heater PM - 1st Generation Application Note (PDF)
• AMAT Endura PVD DeGas Chamber Heater PM - 3rd Generation Application Note (PDF)
• AMAT Etch Application Note (PDF)
• AMAT High Current Implant Decel Column Application Note (PDF)
• AMAT P5000 CVD Chamber Application Note (PDF)
• AMAT Producer Heater PM (PDF)
• AMAT Quantum X Process Chamber (PDF)
• AMAT 5500 TxZ Chamber Application Note (PDF)
• AMAT 5500 TxZ Super Clean Application Note (PDF)
• AMAT WxZ/WxP Buffer Application Note (PDF)
• AMAT WxZ/WxP Chamber Application Note (PDF)
• AMAT XGEN300-CVD Poly Chamber Wet Scrub PM (PDF)
• Axcelis GSD Process Chamber PM Application Note (PDF)
• Axcelis GSD 200E Resolving Housing Clean (PDF)
• Axcelis GSD 200E Ion Source Chamber Clean (PDF)
• Axcelis GSD Ultra PM Report (PDF)
• Axcelis HE Source PM (PDF)
• Davidson Wilder Industrial Optics Coater Chamber (PDF)
• Eaton NV10-160 Source Chamber (PDF)
• Genus ALD Chamber Application Note (PDF)
• Hitachi Metal Etcher (PDF)
• Hitachi Metal Etch Parts Clean [Flapper Valve] (PDF)
• Hitachi STR M712 Non-Metal Etch (PDF)
• Implant Axcelis GSD 200e Process Chamber (PDF)
• Implant XR80 Chamber Application Note (PDF)
• Implant Parts Clean Application Note (PDF)
• Implant-AMAT Quantum X Process Chamber (PDF)
• Implant Varian VIISta 80 Beamline Clean (PDF)
• Kokusai Vertical Diffusion Furnace Door Assembly (PDF)
• LAM 490 Auto Etch Chamber (PDF)
• LAM 2300 Exelan Flex Oxide Etch Chamber (PDF)
• LAM 2300 Exelan Flex Oxide Etch Graphite Electrode (PDF)
• LAM 2300 Exelan Flex Oxide Etch Hot Plate (PDF)
• LAM 2300 - Metal Etch Chamber Clean - Heavy Deposition (PDF)
• LAM 2300 - Metal Etch Chamber Clean - Light Deposition (PDF)
• LAM 4520 Oxide Etch Chamber (PDF)
• LAM 9400 Poly Etch Wet Scrub Application Note (PDF)
• LAM 9600 Metal Etch (PDF)
• LAM 9600 Metal Etch Super Clean #1 (PDF)
• LAM 9600 Metal Etch Super Clean #2 (PDF)
• LAM 9600 Metal Etch VAT Valve (PDF)
• LAM 9600 Metal Etch Wet Strip Application Note (PDF)
• LAM Metal Etch Chamber Clean (PDF)
• LAM Metal Etch PM (View Video)
• MiraSAT® VOC Free Cleanroom Wipers (PDF)
• MultiPlex ICP STS-RIE Chamber Wall Clean (PDF)
• NOVA GSD HE Source Chamber (PDF)
• Novellus Concept 2 Heater Block Scrub (PDF)
• Novellus Concept 1 and 2 Sequel and Vector Application Note (PDF)
• Novellus Concept 1 and 2 Shower Head Wipe Application Note (PDF)
• Novellus INOVA Cool Station Chamber (PDF)
• Novellus INOVA NeXT Degas Chamber (PDF)
• Novellus INOVA PVD Process Chamber (PDF)
• Novellus INOVA VAT Valve (PDF)
• Novellus Speed-2 Dome Scrub Application Note (PDF)
• Novellus Speed 3 In-Place Dome PM Application Note (PDF)
• Plasma-Therm Versalock 700 Chamber Application Note (PDF)
• TEL Unity DRM Chamber (PDF)
• TFT-LCD G5 TEL RIE-PC Chamber Plate and Wall Clean (PDF)
• TOK Photo Top Plate Application Note (PDF)
• Understanding Disinfectants (PPT)
• Varian Kestrel Exchange Housing (PDF)
• Varian VIsion 80 Source Chamber (PDF)
• Varian VIISta HC Process Chamber (PDF)
• WCVD NVLS Altus Heater Clean (PDF)