Vacuum Chamber High Precision PM Procedures

The Foamtec LLC Sales/Application Engineering Staff has worked closely with the leading Tool Manufacturers and Wafer Fab Professionals, to develop a High Precision PM Technique that drives improved tool performance and reduced cost of ownership. Our fab experience and working directly with our customers allowed us to develop tools used for many different special applications to help meet their objectives. We have a world wide network of factory trained engineers to support our customers

.If you would like to request a Vacuum Chamber PM Procedure (or further information) for a specific tool or practice that is not available below, please click here to send us an e-mail. Please be sure to include your name, company name, phone number and tool type. One of our sales engineers will contact you in a timely manner to assist you with the information you require.

• Alcatel 2460 Process Chamber PM Procedure (PDF)
• AMAT 200MM DPS®* Chamber PM Procedure (PDF)
• AMAT 200MM HDP Chamber Scrub PM Procedure (PDF)
• AMAT 200MM HDP Dome Scrub PM Procedure (PDF)
• AMAT Centura®* 5200 Etch Chamber PM Procedure (PDF)
• AMAT CMP Tungsten and Oxide Slurry Clean PM Procedure (PDF)
• AMAT Endura®* CVD/PVD Lid Clean PM Procedure (PDF)
• AMAT Endura®* PVD DeGas Chamber Heater PM - 1st Generation PM Procedure (PDF)
• AMAT Endura®* PVD DeGas Chamber Heater PM - 3rd Generation PM Procedure (PDF)
• AMAT Etch PM Procedure (PDF)
• AMAT High Current Implant Decel Column PM Procedure (PDF)
• AMAT P5000 CVD Chamber PM Procedure (PDF)
• AMAT Producer®* Heater PM Procedure (PDF)
• AMAT Quantum®* X Process Chamber (PDF)
• AMAT 5500 TxZ®* Chamber PM Procedure (PDF)
• AMAT 5500 TxZ®* Super Clean PM Procedure (PDF)
• AMAT WxZ/WxP Buffer PM Procedure (PDF)
• AMAT WxZ/WxP Chamber PM Procedure (PDF)
• AMAT XGEN300-CVD Poly Chamber Wet Scrub PM Procedure (PDF)
• Axcelis GSD Process Chamber PM Procedure (PDF)
• Axcelis GSD 200E Resolving Housing Clean PM Procedure (PDF)
• Axcelis GSD 200E Ion Source Chamber Clean PM Procedure (PDF)
• Axcelis GSD Ultra PM Procedure (PDF)
• Axcelis HE Source PM Procedure (PDF)
• Davidson Wilder Industrial Optics Coater Chamber PM Procedure (PDF)
• Eaton NV10-160 Source Chamber PM Procedure (PDF)
• Genus ALD Chamber PM Procedure (PDF)
• Hitachi Metal Etcher PM Procedure (PDF)
• Hitachi Metal Etch Parts Clean [Flapper Valve] PM Procedure (PDF)
• Hitachi STR M712 Non-Metal Etch PM Procedure (PDF)
• Implant Axcelis GSD 200e Process Chamber PM Procedure (PDF)
• Implant XR80 Chamber PM Procedure (PDF)
• Implant Parts Clean PM Procedure (PDF)
• Implant-AMAT Quantum®* X Process Chamber PM Procedure (PDF)
• Implant Varian VIISTA®* 80 Beamline Clean PM Procedure (PDF)
• Kokusai Vertical Diffusion Furnace Door Assembly PM Procedure (PDF)
• LAM 490 Auto Etch Chamber PM Procedure (PDF)
• LAM 2300 Exelan Flex Oxide Etch Chamber PM Procedure (PDF)
• LAM 2300 Exelan Flex Oxide Etch Graphite Electrode PM Procedure (PDF)
• LAM 2300 Exelan Flex Oxide Etch Hot Plate PM Procedure (PDF)
• LAM 2300 - Metal Etch Chamber Clean - Heavy Deposition PM Procedure(PDF)
• LAM 2300 - Metal Etch Chamber Clean - Light Deposition PM Procedure (PDF)
• LAM 4520 Oxide Etch Chamber (PDF)
• LAM 9400 Poly Etch Wet Scrub PM Procedure (PDF)
• LAM 9600 Metal Etch PM Procedure (PDF)
• LAM 9600 Metal Etch Super Clean #1 PM Procedure (PDF)
• LAM 9600 Metal Etch Super Clean #2 PM Procedure (PDF)
• LAM 9600 Metal Etch VAT Valve PM Procedure (PDF)
• LAM 9600 Metal Etch Wet Strip PM Procedure (PDF)
• LAM Metal Etch Chamber Clean PM Procedure(PDF)
• LAM Metal Etch PM Procedure (View Video)
• MiraSAT® VOC Free Cleanroom Wipers PM Procedure (PDF)
• MultiPlex ICP STS-RIE Chamber Wall Clean PM Procedure (PDF)
• NOVA GSD HE Source Chamber PM Procedure (PDF)
• Novellus Concept 2 Heater Block Scrub PM Procedure (PDF)
• Novellus Concept 1 and 2 Sequel and Vector PM Procedure (PDF)
• Novellus Concept 1 and 2 Shower Head Wipe PM Procedure (PDF)
• Novellus INOVA Cool Station Chamber PM Procedure (PDF)
• Novellus INOVA NeXT Degas Chamber PM Procedure (PDF)
• Novellus INOVA PVD Process Chamber PM Procedure (PDF)
• Novellus INOVA VAT Valve PM Procedure (PDF)
• Novellus Speed-2 Dome Scrub PM Procedure (PDF)
• Novellus Speed 3 In-Place Dome PM PM Procedure (PDF)
• Plasma-Therm Versalock 700 Chamber PM Procedure (PDF)
• TEL Lithius Cleantrack PM Procedure (PDF)
• TEL Unity DRM Chamber PM Procedure (PDF)
• TFT-LCD G5 TEL RIE-PC Chamber Plate and Wall Clean PM Procedure (PDF)
• TOK Photo Top Plate PM Procedure (PDF)
• Understanding Disinfectants (PPT)
• Varian Kestrel Exchange Housing PM Procedure (PDF)
• Varian VIISION®* 80 Source Chamber PM Procedure (PDF)
• Varian VIISTA®* HC Process Chamber PM Procedure (PDF)
• WCVD NVLS Altus Heater Clean PM Procedure (PDF)

*DPS®, Centura®, Endura®, Producer®, Quantum®, TxZ®, VIISTA® and VIISION® are registered trademarks of Applied Materials, Inc.