Introduction: In the realm of semiconductor fabrication processes, ashers, also known as ashing or plasma ashing systems, hold immense importance. These systems are responsible for removing organic materials, such as photoresist, from the surface of wafers or substrates. Among the challenges fab engineers face are particle problems caused by byproducts and wear on microwave ashers. To combat these issues and improve wet cleans, Foamtec’s UltraSOLV chamber cleaning products, including SCRUBPADS, ScruBELTS, ScrubWRIGHT, and MiraWIPE, offer innovative solutions. Let’s explore how these products benefit the cleaning process on popular ashers like PSK, Mattson, Axcelis, and LAM.
Understanding Ashers and Their Challenges: Ashers operate within high vacuum chambers, subjecting wafers to a plasma environment where organic materials are oxidized and converted into volatile byproducts. This process typically occurs after photolithography, removing the photoresist pattern that has served as a mask for subsequent steps. However, the buildup of byproducts and the degradation of the quartz tube in microwave ashers can lead to particle contamination, especially in hard-to-reach areas like the waveguide and tube flange. Such challenges necessitate effective cleaning solutions.
Foamtec’s ScrubPAD and ScrubWRIGHT for Enhanced Wet Cleans: Foamtec offers an array of cutting-edge products designed to address the unique cleaning requirements of Ashers. Among these are the diamond-coated ScrubPAD and ScrubWRIGHT, which are crucial in achieving optimal cleaning results.
ScrubPAD: Foamtec’s diamond ScrubPAD is engineered explicitly with wet-dry coated abrasives to remove residues, rust, and byproducts from process tools like Ashers. Its exceptional design makes it ideal for tackling caked-on residues on the waveguide’s inner surfaces and the tube flange’s mating surfaces. Moreover, it can also be effectively applied to the chamber wall to scrub off residues without introducing additional shedded particles, a concern arising when using traditional alternatives like Scotch-Brite. This feature ensures a thorough cleaning while reducing the risk of particle contamination.
ScrubBELT on ScrubWRIGHT: The ScrubBELT, used in conjunction with Foamtec’s ScrubWRIGHT, proves to be a valuable asset in addressing cleaning challenges in tight corners and radial surfaces of the waveguide and tube flange. By effectively removing buildup along the grains of the surface, this combination helps maintain cleanliness and prevent particle problems. The ScrubWRIGHT’s ergonomic design and versatility make it highly suitable for intricate cleaning tasks, ensuring efficient cleaning even in hard-to-reach areas.
Advantages of Foamtec’s Solutions: Foamtec’s UltraSOLV chamber cleaning products offer several benefits that make them indispensable in general ashers and semiconductor fabrication processes.
- Enhanced Throughput: Particle problems on Ashers can lead to downtime and reduced productivity. By effectively mitigating these issues, Foamtec’s solutions contribute to increased asher throughput, ensuring smoother operations and improved factory performance.
- Thorough Cleaning: The diamond-coated ScrubPAD and ScrubBELT provide superior cleaning capabilities, efficiently removing residues, rust, and byproducts from critical surfaces. This thorough cleaning reduces the risk of contamination and supports producing high-quality semiconductor devices.
- Minimized Particle Shedding: Foamtec’s products are designed to minimize the introduction of additional particles during the cleaning process. This crucial advantage ensures a cleaner environment and reduces the need for subsequent cleaning cycles.
- Versatility and Ease of Use: Foamtec’s cleaning solutions
ScrubWRIGHT and ScrubBELTS