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How Foamtec’s Chamber Cleaning Products Can Reduce Tech Time, Consumables Cost and Green to Green Time While Improving First Pass Qual Rates for Lam 2300 Metal Etch Tools

by | May 10, 2024

In the world of semiconductor manufacturing, time is money. Every minute a tool is down for cleaning is a minute that it’s not producing chips. That’s why it’s so important to have a fast, effective, and cost-efficient chamber cleaning process.

This blog post will discuss how Foamtec’s chamber cleaning products can help you reduce tech time, consumables cost, and green-to-green time while improving first-pass qual rates for your Lam 2300 metal etch tools.

The Old Way of Doing Things

The traditional method for cleaning Lam 2300 metal etch chambers is a time-consuming and labor-intensive process. It typically takes three hours and involves using Scotch-Brite pads, DI water, and IPA. This process has several drawbacks:

  • It’s slow: Three hours is a long time to have a tool down for cleaning.
  • It’s labor-intensive: The process requires a lot of manual scrubbing, which can be tiring for operators.
  • It’s expensive: Scotch-Brite pads and other abrasives can damage the chamber walls, leading to costly repairs.

The Foamtec Way

Foamtec’s chamber cleaning products offer a faster, more effective, and more cost-efficient alternative to the traditional method. Our PM kits include everything you need to clean your Lam 2300 chamber quickly and easily, including:

  • UltraSOLV® Sponges: These sponges are designed to remove light deposition without damaging the chamber walls.
  • 360 Grit Diamond ScrubPADs: These pads are effective at removing stubborn deposition.
  • MiraWIPEs®: These wipes are used with IPA to thoroughly clean and dry the chamber.


The Benefits of Using Foamtec’s Chamber Cleaning Products

There are many benefits to using Foamtec’s chamber cleaning products, including:

  • Reduced tech time: Our cleaning process can be completed in just one hour, saving you valuable production time.
  • Reduced consumables cost: Our PM kits are more cost-effective than traditional cleaning methods.
  • Reduced green-to-green time: The faster cleaning process means you can get your tool back up and running sooner.
  • Improved first-pass qual rates: Our cleaning products help to ensure that your chamber is clean and free of contamination, which can lead to improved first-pass qual rates.


If you’re looking for a faster, more effective, and more cost-efficient way to clean your Lam 2300 metal etch chambers, then Foamtec’s chamber cleaning products are the perfect solution. Contact us today to learn more about how our products can help you improve your productivity and reduce your costs.

Contact us today!