Wafer processing tools are critical components in the semiconductor industry, and keeping them clean is essential for maintaining optimal performance and quality. High Precision Preventative Maintenance (HPPM) is essential in the wafer fabs, especially for tools such as metal etch and dry strip (ASH) tools that generate process residues that are more soluble in water, as long pump down times are associated with using water. This is primarily due to the poor drying and particle removal ability of polyester wipers wetted with water, leading to extended downtime and poor first-pass tool qualification rates.
Foamtec International’s MiraSAT is a game-changer in this scenario. The MiraSAT is a MiraWIPE microfiber that is Presatuarated with ultrapure water (UPW) and is designed to speed up wet cleaning on metal etch chambers. The MiraSAT is production-proven in sub 10nm wafer fabs and has been tested to be highly effective in removing particles and other contaminants from the tool surfaces.
Using UPW in the MiraSAT ensures that the cleaning process is extremely efficient and effective. UPW is a highly purified form of water that is free from impurities and contaminants, making it ideal for use in the wafer processing industry. The microfiber material used in the MiraSAT is also highly absorbent, so it can effectively remove particles and contaminants from the tool surfaces.
The MiraSAT is also designed to be highly resistant to abrasion-induced particle shedding. The microfiber material is resistant to wear and tear, and the UPW presaturation ensures that the MiraSAT remains effective even after multiple uses. This means that manufacturers can use the MiraSAT for extended periods without having to replace it frequently, which results in cost savings in the long run.
In conclusion, Foamtec International’s MiraSAT is a highly effective solution for wet cleaning metal etch chambers in the wafer processing industry. The use of UPW in the MiraSAT ensures that the cleaning process is efficient and effective, while the microfiber material is highly absorbent and durable. The MiraSAT is production-proven in sub 10nm wafer fabs and can help manufacturers speed up wet cleaning processes, reduce downtime and improve first-pass tool qualification rates.
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MiraSAT comes in different solution configurations to meet different applications:
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