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How to Improve the Efficiency of Preventive Maintenance of Large Vacuum Coating Chambers

by | Mar 8, 2023

In the world of high-tech manufacturing, achieving consistently high-quality products is essential. One of the most critical aspects of this is ensuring that the production equipment is maintained correctly. Preventive maintenance is crucial in preventing unexpected equipment downtime, which can cause significant production delays, loss of revenue, and customer dissatisfaction.

For industries that require large vacuum chambers, such as the production of flat panel displays, optics, automotive and architectural glass, and thin film solar cells, maintaining the cleanliness of these chambers is of utmost importance. Process deposition accumulates inside the vacuum chamber, requiring periodic preventive maintenance.

To combat this problem, Foamtec, the leading manufacturer of contamination control products for vacuum chambers in the semiconductor industry, has developed a new pneumatic sanding tool called PneuSCRUB. This innovative tool and the UltraSOLV diamond ScrubDISKS can significantly reduce tech time, equipment downtime, and particle contamination for preventive maintenance in large vacuum chambers.

Traditionally, maintenance technicians would have to spend hours manually scrubbing the interior surfaces of vacuum chambers to remove stubborn contaminants. This process was time-consuming and created an environment for cross-contamination and prolonged pump-down times, as it required leaving the tool open for many hours or shifts. However, with PneuSCRUB, maintenance technicians can now remove even the most challenging contaminants in minutes with the help of compressed air, eliminating the need for manual scrubbing.

Moreover, traditional sanding tools produce a large amount of dust and particles, which can settle on the cleaned surfaces and cause additional contamination. However, with the UltraSOLV diamond ScrubDISKS, the PneuSCRUB produces minimal dust and significantly reduces the risk of particle contamination. The unique diamond pattern of the ScrubDISKS also ensures consistent cleaning performance and reduces the need for frequent replacement.

Another significant advantage of PneuSCRUB is that it can be easily attached to a vacuum system, which enables the tool to suction up and remove any loose particles, preventing them from settling back onto the cleaned surface. This feature reduces the risk of secondary contamination, ensuring the chamber is left clean and ready for use.

Overall, Foamtec’s PneuSCRUB pneumatic sanding tool with UltraSOLV diamond ScrubDISKS is an innovative solution to reduce tech time, equipment downtime, and particle contamination for preventive maintenance in large vacuum chambers. With this new tool, maintenance technicians can clean even the most stubborn contaminants in minutes, significantly improving production efficiency and product quality.

PneuSCRUB Pneumatic Sanding Tool:



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