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Improving Vacuum Chamber Cleanliness by Removing Particles Entrapped in Lift Pin Ports

by | Feb 16, 2023

As semiconductor technology advances, the need for cleanliness in wafer fabs becomes more and more critical. With geometries becoming smaller and smaller, any particle or contamination can cause serious issues.

Eliminating particle contamination entrapped in Lift-off vacuum ports(lift pin ports) integrated into electrostatic chucks CVD, plasma etch, and PVD tools have been a longstanding need. Fortunately, there is a new tool available that can make this task much easier and more effective. This tool is a swab explicitly designed to clean small orifices. Traditional swabs are ineffective in cleaning lift pin ports because they are too large. The new swab is smaller and more precise, making it ideal for cleaning these hard-to-reach areas.

Cleaning lift pin ports in electrostatic chucks are especially important in advanced fabs running sub 10nm geometries. When these ports are not cleaned properly, contamination can build up, causing unscheduled PMs, wafer dechunking and reduced yield. By using the new swab, fabs can ensure that lift pin ports are cleaned thoroughly and regularly, reducing the risk of contamination and improving process performance.

HT15076X – 6″ Flexible Super Fine Tip

Head Thickness: 1.5 mm
Head Width: 1.5 mm
Head Length: 12.8 mm
Handle Length: 128.2 mm
Handle Diameter: 3.0 mm
Total Length: 153.0 mm
Head Material: Microfiber Fabric
Head Bond: Thermal
Handle Material: Polypropylene
Handle Color: Blue

The swab is easy to use and can be integrated into existing cleaning processes. It is made from high-quality materials, including a microfiber tip, to provide excellent particle entrapment and removal. This means that fabs can rely on the swab to deliver consistent results and reduce the need for costly repairs or downtime.

In conclusion, the new swab for cleaning lift pin ports is an ideal tool for wafer fabs looking to improve vacuum chamber cleanliness. By using this swab to clean lift pin ports on CVD, plasma etch, and PVD tools, fabs can ensure that their processes are free from contamination and run smoothly.

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