Cleaning Critical Surfaces in Cleanrooms
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Tokyo Ohka Kogyo(TOK) Resist Coater
Traditional Cleaning SOP's Leave Process Residue Causing Long Recovery Times and Create Scotch-Brite™ Related Particle Issues
Foamtec's Vacuum Chamber Cleaning Kits Eliminate Scotch-Brite™ and Return Chambers to Like New Condition
Information
Cleaning hardened photo resist(PR) from resist coaters has always been a challenge in FPD fabs but with the advent of Gen 5, 6 and 7 substrates the problem has been amplified. Now for the first time
engineers have a viable cleaning method to remove hardened PR residue.
Advantages
• Reduced Top Plate PM Times
• Eliminates Resist Peeling Defects And Expensive Outsourcing of Top Plate
• Reduced Particle Defects