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Plasma-Therm Etch Cleaning

Foamtec PM Kits reduce the cost, time and post PM particles issues so often associated with PM procedures on Plasma-Therm RIE Tools. UltraSOLV® High Precision PM Kits (listed below) and cleaning procedure for the ceramic spool, electrode and metal portions of Versalok and VERSALINE chambers. The kit contains UltraSOLV® Diamond ScrubPADS, Sponges and Wipers that enable the following benefits:.

Key Features

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Quick, thorough wiping of the ceramic spool even when it has been etched
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Polish and cleaning of the ceramic spool in less than 15 minutes
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Scrubbing and cleaning of the electrode assembly in less than 15 minutes
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Complete chamber PM in less than an hour
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Achieve pump down to bases vacuum in 30-40% less time than with standard PM cleaning
medical-device

Plasma-Therm Ceramic Spool Pre PM

medical-device

Plasma-Therm Ceramic Spool Post PM

medical-device

Plasma-Therm Ceramic Clamp Ring Pre PM

medical-device

Plasma-Therm Ceramic Clamp Ring Post PM

About Foamtec WCC

Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.

 

Contact Us

Address

6575 IH-35 North
Waco, TX 76705