Plasma-Therm Etch Cleaning
Foamtec PM Kits reduce the cost, time and post PM particles issues so often associated with PM procedures on Plasma-Therm RIE Tools. UltraSOLV® High Precision PM Kits (listed below) and cleaning procedure for the ceramic spool, electrode and metal portions of Versalok and VERSALINE chambers. The kit contains UltraSOLV® Diamond ScrubPADS, Sponges and Wipers that enable the following benefits:.
Key Features
Plasma-Therm Ceramic Spool Pre PM
Plasma-Therm Ceramic Spool Post PM
Plasma-Therm Ceramic Clamp Ring Pre PM
Plasma-Therm Ceramic Clamp Ring Post PM
About Foamtec WCC
Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.