Ion Implant Preventive Maintenance Cleaning Applications
The Foamtec International Sales/Application Engineering Staff has worked closely with the leading Tool Manufacturers and wafer fab professionals, to develop a High Precision PM Technique that drives improved tool performance and reduced cost of ownership. Our fab experience and working directly with our customers allowed us to develop tools used for many different special applications to help meet their objectives.We have a world wide network of factory trained engineers to support our customers. Ion Implanter cleaning is improved with High Precision PM kits. Vacuum Chamber Cleaning Products are designed to give AMAT, Axcelis, and Varian Implant Engineers the ability to improve PM protocols, and give our customers the opportunity to reduce Cost and Mean Time to Clean (MTTC) while improving tool availability.
Advantages
Procedures designed to quickly clean Varian, AMAT and Axcelis Ion Implant process residue down to bare metal
Cleaning tools specially designed for slit valves, quartz view ports, pump ports, shower heads, and O-ring Grooves
Procedures to eliminate Scotch-Brite™ and the SAFETY HAZARDS of using H2O2 from Source Areas, Beamlines, Resolving and Process Chambers
Final cleaning procedures reduce recovery time and particle levels
Quickly Clean Off Process Deposition w/o Scotchbrite
Improve Post PM Particle Control
Eliminate H2O2 & Improve Tool Availability
About Foamtec WCC
Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.