STS Plasma etch users face challenging equipment maintenance issues as the process induced residue is very hard to completely clean using Scotch-Brite™ abrasive hand pads. As a result most STS Plasma etch PM's are characterized by prolonged scrubbing routines and recovery times. In addition extensive seasoning is required to control particle .
contamination. Foamtec's Vacuum Chamber Cleaning Products makes these PM related issues a thing of the past. Versalok and VERSALINE chambers. The kit contains UltraSOLV® Diamond ScrubPADS, Sponges and Wipers that enable the following benefits:.
• Quick, thorough wiping of the ceramic spool even when it has been etched
• Polish and cleaning of the ceramic spool in less than 15 minutes
• Scrubbing and cleaning of the electrode assembly in less than 15 minutes
• Complete chamber PM in less than an hour
• Achieve pump down to bases vacuum in 30-40% less time than with standard PM cleaning
Scotch-Brite™ is a trademark of 3M Corporation