STS Plasma Etching
STS RIE Etch tools Cleaned With Foamtec High Precision PM Kits Can Be Returned to Like New Condition in Much Less Time
STS Plasma etch users face challenging equipment maintenance issues as the process induced residue is very hard to completely clean using Scotch-Brite™ abrasive hand pads. As a result most STS Plasma etch PM’s are characterized by prolonged scrubbing routines and recovery times. In addition extensive seasoning is required to control particle contamination.
Foamtec’s Vacuum Chamber Cleaning Products makes these PM related issues a thing of the past. Versalok and VERSALINE chambers. The kit contains UltraSOLV® Diamond ScrubPADS, Sponges and Wipers that enable the following benefits:.
Key Features
Traditional Cleaning SOP's Leave Process Residue Causing Long Recovery Times and Create Scotch-Brite™ Related Particle Issues
Foamtec's Vacuum Chamber Cleaning Kits Eliminate Scotch-Brite™ and Return Chambers to Like New Condition
About Foamtec WCC
Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.