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STS Plasma Etching

STS RIE Etch tools Cleaned With Foamtec High Precision PM Kits Can Be Returned to Like New Condition in Much Less Time

STS Plasma etch users face challenging equipment maintenance issues as the process induced residue is very hard to completely clean using Scotch-Brite™ abrasive hand pads. As a result most STS Plasma etch PM’s are characterized by prolonged scrubbing routines and recovery times. In addition extensive seasoning is required to control particle contamination.

Foamtec’s Vacuum Chamber Cleaning Products makes these PM related issues a thing of the past. Versalok and VERSALINE chambers. The kit contains UltraSOLV® Diamond ScrubPADS, Sponges and Wipers that enable the following benefits:.

Key Features

Quick, thorough wiping of the ceramic spool even when it has been etched
Polish and cleaning of the ceramic spool in less than 15 minutes
Scrubbing and cleaning of the electrode assembly in less than 15 minutes
Complete chamber PM in less than an hour
Achieve pump down to bases vacuum in 30-40% less time than with standard PM cleaning

Traditional Cleaning SOP's Leave Process Residue Causing Long Recovery Times and Create Scotch-Brite™ Related Particle Issues


Foamtec's Vacuum Chamber Cleaning Kits Eliminate Scotch-Brite™ and Return Chambers to Like New Condition

Scotch-Brite™ is a trademark of 3M Corporation

About Foamtec WCC

Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.


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6575 IH-35 North
Waco, TX 76705