Mopping of floors in large cleanrooms presents significant Environmental, Health and Safety (EHS) risks to wafer fabs, LCD fabs and microelectronics manufacturing sites. At the same time, cleanroom floors require frequent cleaning in order to meet ever tighter particle control budgets.
Due to the high surface tension of water and to guard against slip hazards, microelectronics facilities and especially wafer fabs consume copious quantities of IPA in mopping SOPs. While IPA aids cleaning and the quick drying of floors, the large volumes required present significant EHS challenges in the way of VOC emissions and fire hazards. In fact, it is typical that clean room mopping is the major source of VOC emissions in LCD and 300mm wafer fabs.
In many cleaning applications, microfiber fabrics are production proven to allow water to replace solvents and detergents. To improve cleaning and reduce mopping-generated VOC’s, Foamtec has introduced a microfiber mop that is pre-saturated with Ultra-Pure Water and designed to leave floors dry.
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