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MiraSAT™ 70/30

Presaturated Cleanroom Microfiber Wipes for the Most Demanding Cleaning Tasks

MiraSAT™ 70/30: The premium Presaturated Microfiber Wipes for Cleanrooms

If you are looking for a high-performance, low-VOC, and cost-effective solution for your cleanroom cleaning needs, look no further than MiraSAT™ 70/30. These presaturated microfiber wipes are specially designed to remove the toughest contaminants from your equipment and surfaces, while leaving them dry and residue-free.

What Makes MiraSAT™ 70/30 Different? MiraSAT™ 70/30 combines the superior cleaning power of Foamtec’s MiraWIPE™ microfiber fabric with the optimal wetting of 70% semiconductor grade IPA and 30% ultrapure water. Unlike other presaturated wipes, MiraSAT™ 70/30 uses only 7.2mL of fluid per wiper, which reduces VOC emissions, hazardous waste, and evaporation issues. The unique woven microfiber structure enables scrubbing-like action to dislodge, entrap, and remove stubbornly adhered particles, while the sealed edge prevents fiber shedding and snagging. MiraSAT™ 70/30 is manufactured and processed in an ISO 5 cleanroom, and each pack contains 20 wipers that are double bagged for easy cleanroom entry.

What Are the Applications of MiraSAT™ 70/30? MiraSAT™ 70/30 is suitable for use in ISO Class 3 and higher cleanrooms, and can handle a variety of cleaning tasks, such as:

  • Improving post-PM particle performance and recovery time in high vacuum process chambers
  • Cleaning VOC-sensitive process equipment in lithography, CVD, and metrology modules
  • Cleaning baked-on resist and developer from lithography tracks
  • Reducing foreign particle contamination on sensitive components such as EFEMs, electrostatic chucks, VAT valves, and gas dispersion plates
  • Cleaning wafer handling systems to eliminate linear scratch defect events
  • MiraSAT™ 70/30 is also static dissipative for use in ESD-sensitive environments

How to Use MiraSAT™ 70/30 with Foamtec’s HPM Technique? For the best results, we recommend using MiraSAT™ 70/30 with Foamtec’s HPM (High Pressure Mechanical) technique, which involves using the UltraSOLV® ScrubPAD and Sponge to apply high pressure and mechanical force to the surface, followed by wiping with MiraSAT™ 70/30 to remove the loosened contamination. This technique enhances the cleaning efficiency and reduces the wiper usage, hazardous waste, and equipment downtime.

Order MiraSAT™ 70/30 Today If you want to experience the benefits of MiraSAT™ 70/30 for yourself, contact us today to request a free sample or a quote. You can also download our datasheet for more information. Trust Foamtec, the industry leader in critical cleaning supplies, to provide you with the best presaturated microfiber wipes for your cleanroom. Order MiraSAT™ 70/30 today and see the difference.

Applications

Foamtec’s HPM Technique

Combined with the UltraSOLV® ScrubPAD and Sponge, MiraSAT’s capabilities to dislodge, entrap and remove stubbornly adhered contamination reduces wiper usage, hazardous waste and equipment recovery time.

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For use in ISO Class 3 and higher cleanrooms.
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Cleaning of hi-vac process chambers and robotics in flat panel display and wafer fabs.
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Cleaning VOC sensitive process equipment in lithography, CVD and metrology modules.
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Cleaning baked-on resist and developer from lithography tracks.
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Final wipedown of sensitive components such as EFEM’s, electrostatic chucks, VAT valves and gas dispersion plates.
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Equipment PM’s and wet cleans where the elimination of VOC’s and flammable solvents are required.
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Ideal for cleaning wafer handling systems to eliminate linear scratch defect events.

Process Benefits

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Significantly reduces VOC’s for sensitive fab modules such as lithography, metrology and CVD.
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Unsurpassed abrasion & snag resistance minimizes scratch defects and particle excursions associated with fab wipers.
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For equipment PM’s, the lightly dampened, woven microfiber fabric is production proven to improve equipment uptime and first pass qual rates.
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Foamtec’s state of the art ISO 5 processing facilities produces a wiper optimized for use in the most advanced wafer fabs.
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Eliminates contamination risks associated with soiled IPA squirt bottles.

Environmental Health & Safety Benefits

Environmental Constraints for the Semiconductor Industry are only Increasing

Implementing MiraSAT™ helps wafer fabs to remain within their air permit limits while making a step change improvement in environmental compliance and cost avoidance.

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Reduce flammable chemical storage, solvent squirt bottles, and handling of IPA in the cleanroom.
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Reduce fugitive VOC emissions and air permit implications associated with solvent wiping.
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Reduce personnel exposure to isopropyl alcohol during cleanroom wipe downs.
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Product
Description
Quantity
Details

MiraSAT™ Microfiber Sealed Edge Cleanroom Wiper presaturated with 70% IPA & 30% Ultrapure Water. Each pack is double bagged to aid cleanroom entry protocols.


Material: Microfiber
Size: 9" x 9"
Seal: Wide Sealed Edge
Solution: 144mL, 70% IPA & 30% Ultrapure Water
Quantity/Pack:
20
Packs/Case:
20

MiraSAT™ Comes in different solvent configurations to meet your application’s needs

MiraSAT™ UPW Wipers

MiraSAT™ UPW is pre-saturated with 100% Ultrapure Water(UPW), 144mL. Designed for ISO 3-5 Cleanrooms.

MiraSAT™ 10/90 Wipers

MiraSAT™ 10/90 is pre-saturated with 10% Semiconductor Grade IPA & 90% Ultrapure Water(UPW), 144mL. Designed for ISO 3-5 Cleanrooms.

MiraSAT™ 70/30 H Wipers

MiraSAT™ 70/30 H is pre-saturated with 70% Semiconductor Grade IPA & 30% Ultrapure Water(UPW), 190mL. Designed for ISO 3-5 Cleanrooms.

MiraSAT™ SM 70/30 H Wipers

MiraSAT™ SM 70/30 H is pre-saturated with 70% USP IPA & 30% Ultrapure Water(UPW), 190mL. Designed for ISO 5-8 Cleanrooms.

MiraSAT™ 100% IPA Wipers

MiraSAT™ 100% IPA is pre-saturated with 100% Semiconductor Grade IPA, 144mL. Designed for ISO 3-5 Cleanrooms.

About Foamtec WCC

Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.

 

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6575 IH-35 North
Waco, TX 76705