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MiraSAT™ 100% UPW Wipes

The VOC Free Cleanroom Wiper

MiraSAT™ UPW: The Premium Presaturated Cleanroom Wiper for Sub 14nm Wafer Fabs and GMP Facilities

MiraSAT™ UPW is a revolutionary cleanroom wiper presaturated with 100% UltraPure Water (UPW) that delivers superior cleaning performance without the use of volatile organic compounds (VOCs) or flammable solvents. MiraSAT™ UPW is specially designed for sub 14nm wafer fabs, where VOC contamination can compromise product quality and yield. MiraSAT™ UPW is also ideal for removing disinfectant residues and fingerprint stains from stainless steel equipment in good manufacturing practice (GMP) facilities, where cleanliness and safety are paramount.

MiraSAT™ UPW is made of woven cleanroom microfiber that offers enhanced absorbency and foreign particle contamination removal compared to conventional polyester wipers. The high-density, ultra-smooth woven polyester/nylon fabric reduces the shedding of particulates from the wiper surface during heavy-duty equipment cleaning tasks. The weave and high tensile strength sealed edge provide unmatched resistance to abrasion and tearing to minimize in-use particle and fiber generation. MiraSAT’s™ non-symmetrical microfiber structure enables stubbornly adhered contamination to be dislodged, entrapped and removed from product contact surfaces and components.

MiraSAT™ UPW requires only 7ml of solution to be uniformly dampened, which enables scrubbing-like cleaning action to dislodge, entrap and remove contaminants while eliminating IPA consumption by 100%*. MiraSAT™ UPW is laundered and packed to ensure compatibility with ISO Class 3 cleanrooms. MiraSAT™ UPW is lot tested and certified by LPC, Helmke drum and optical test methods to ensure control of submicron to 500-micron particles. Each pack is double bagged to facilitate cleanroom entry protocols.

*Compared to existing presaturated isopropyl alcohol wipers

Applications MiraSAT™ UPW Enables High Precision Preventive Maintenance Combined with the UltraSOLV® ScrubPAD and Sponge, MiraSAT™ UPW provides a complete cleaning solution for sub 14nm wafer fabs and GMP facilities. MiraSAT™ UPW can be used for:

Typical cleaning applications are:

  • Cleaning wafer carriers, cassettes, pods and FOUPs
  • Cleaning process chambers, robots, tracks and load ports
  • Cleaning optical lenses, mirrors and windows
  • Cleaning stainless steel surfaces contaminated with disinfectant residues
  • Cleaning glove boxes, isolators and laminar flow hoods

Applications

Foamtec’s HPM Technique

Combined with the UltraSOLV® ScrubPAD and Sponge, MiraSAT’s capabilities to dislodge, entrap and remove stubbornly adhered contamination reduces wiper usage, hazardous waste and equipment recovery time.

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For use in ISO Class 3 and higher cleanrooms.
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Cleaning of hi-vac process chambers and robotics in flat panel display and wafer fabs.
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Cleaning VOC sensitive process equipment in lithography, CVD and metrology modules.
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Cleaning baked-on resist and developer from lithography tracks.
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Final wipedown of sensitive components such as EFEM’s, electrostatic chucks, VAT valves and gas dispersion plates.
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Equipment PM’s and wet cleans where the elimination of VOC’s and flammable solvents are required.
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Ideal for cleaning wafer handling systems to eliminate linear scratch defect events.

Process Benefits

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Significantly reduces VOC’s for sensitive fab modules such as lithography, metrology and CVD.
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Unsurpassed abrasion & snag resistance minimizes scratch defects and particle excursions associated with fab wipers.
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For equipment PM’s, the lightly dampened, woven microfiber fabric is production proven to improve equipment uptime and first pass qual rates.
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Foamtec’s state of the art ISO 5 processing facilities produces a wiper optimized for use in the most advanced wafer fabs.
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Eliminates contamination risks associated with soiled IPA squirt bottles.

Environmental Health & Safety Benefits

Environmental Constraints for the Semiconductor Industry are only Increasing

Implementing MiraSAT™ helps wafer fabs to remain within their air permit limits while making a step change improvement in environmental compliance and cost avoidance.

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Reduce flammable chemical storage, solvent squirt bottles, and handling of IPA in the cleanroom.
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Reduce fugitive VOC emissions and air permit implications associated with solvent wiping.
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Reduce personnel exposure to isopropyl alcohol during cleanroom wipe downs.
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Product
Description
Quantity
Details

MiraSAT™ Microfiber Sealed Edge Cleanroom Wiper presaturated with 100% Ultrapure Water, 144mL. Each pack is double bagged to aid cleanroom entry protocols.


Material: Microfiber
Size: 9" x 9"
Seal: Wide Sealed Edge
Solution: 100% Ultrapure Water, 144mL
Quantity/Pack:
20
Packs/Case:
20

MiraSAT™ Comes in different solvent configurations to meet your application’s needs

MiraSAT™ 10/90 Wipers

MiraSAT™ 10/90 is pre-saturated with 10% Semiconductor Grade IPA & 90% Ultrapure Water(UPW), 144mL. Designed for ISO 3-5 Cleanrooms.

MiraSAT™ 70/30 Wipers

MiraSAT™ 70/30 is pre-saturated with 70% Semiconductor Grade IPA & 30% Ultrapure Water(UPW), 144mL. Designed for ISO 3-5 Cleanrooms.

MiraSAT™ 70/30 H Wipers

MiraSAT™ 70/30 H is pre-saturated with 70% Semiconductor Grade IPA & 30% Ultrapure Water(UPW), 190mL. Designed for ISO 3-5 Cleanrooms.

MiraSAT™ SM 70/30 H Wipers

MiraSAT™ SM 70/30 H is pre-saturated with 70% USP IPA & 30% Ultrapure Water(UPW), 190mL. Designed for ISO 5-8 Cleanrooms.

MiraSAT™ 100% IPA Wipers

MiraSAT™ 100% IPA is pre-saturated with 100% Semiconductor Grade IPA, 144mL. Designed for ISO 3-5 Cleanrooms.

About Foamtec WCC

Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.

 

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Address

6575 IH-35 North
Waco, TX 76705