MiraSAT™ UPW Ultrapure Water Presaturated Cleanroom Microfiber Wipers for Chemical-Free Surface Cleaning

The VOC Free Cleanroom Wiper

MiraSAT™ UPW: The Premium Presaturated Cleanroom Wiper for Sub 14nm Wafer Fabs and GMP Facilities

MiraSAT™ UPW is a revolutionary cleanroom wiper presaturated with 100% UltraPure Water (UPW) that delivers superior cleaning performance without the use of volatile organic compounds (VOCs) or flammable solvents. MiraSAT™ UPW is specially designed for sub 14nm wafer fabs, where VOC contamination can compromise product quality and yield. MiraSAT™ UPW is also ideal for removing disinfectant residues and fingerprint stains from stainless steel equipment in good manufacturing practice (GMP) facilities, where cleanliness and safety are paramount.

MiraSAT™ UPW is made of woven cleanroom microfiber that offers enhanced absorbency and foreign particle contamination removal compared to conventional polyester wipers. The high-density, ultra-smooth woven polyester/nylon fabric reduces the shedding of particulates from the wiper surface during heavy-duty equipment cleaning tasks. The weave and high tensile strength sealed edge provide unmatched resistance to abrasion and tearing to minimize in-use particle and fiber generation. MiraSAT’s™ non-symmetrical microfiber structure enables stubbornly adhered contamination to be dislodged, entrapped and removed from product contact surfaces and components.

MiraSAT™ UPW requires only 7ml of solution to be uniformly dampened, which enables scrubbing-like cleaning action to dislodge, entrap and remove contaminants while eliminating IPA consumption by 100%*. MiraSAT™ UPW is laundered and packed to ensure compatibility with ISO Class 3 cleanrooms. MiraSAT™ UPW is lot tested and certified by LPC, Helmke drum and optical test methods to ensure control of submicron to 500-micron particles. Each pack is double bagged to facilitate cleanroom entry protocols.

*Compared to existing presaturated isopropyl alcohol wipers

Applications MiraSAT™ UPW Enables High Precision Preventive Maintenance Combined with the UltraSOLV® ScrubPAD and Sponge, MiraSAT™ UPW provides a complete cleaning solution for sub 14nm wafer fabs and GMP facilities. MiraSAT™ UPW can be used for:

Typical cleaning applications are:

• Cleaning wafer carriers, cassettes, pods and FOUPs
• Cleaning process chambers, robots, tracks and load ports
• Cleaning optical lenses, mirrors and windows
• Cleaning stainless steel surfaces contaminated with disinfectant residues
• Cleaning glove boxes, isolators and laminar flow hoods