Presaturated Cleanroom Microfiber Wipers

MiraSAT® Presaturated Microfiber cleanroom Wipers: Precision Cleaning for Advanced Wafer Fabs

Foamtec’s MiraSAT® Wipers are the industry’s go-to solution for achieving pristine cleanliness in semiconductor manufacturing. Whether you’re an equipment engineer, process engineer, or part of the fab team, MiraSAT® delivers unmatched performance:

Key Features and Applications:

1. Particle Pickup, Minimized Shedding:
• MiraSAT® wipes are presaturated with a microfiber fabric engineered for maximum particle pickup while minimizing shedding.
• The unique woven microfiber structure dislodges, entraps, and removes stubbornly adhered particulate contamination.
• Applications: Ideal for wiping down sensitive surfaces, equipment, and critical tools in advanced wafer fabs.
2. Streak-Free, Dry Surfaces:
• MiraSAT®’s high-density, woven fabric leaves surfaces impeccably clean, streak-free, and dry.
• Say goodbye to residue and smudges—MiraSAT® ensures flawless results.
3. Reducing Post-PM Particle Counts:
• MiraSAT® has been production-proven in the most advanced 5nm and 7nm semiconductor nodes.
• It significantly reduces post-PM particle counts, enhancing yield and minimizing defects.
4. Fiber Generation Control:
• The high tensile strength sealed edge minimizes fiber generation during use.
• MiraSAT® is the answer to expensive scratch defect issues associated with traditional wipers.
5. Environmental Compliance and Cost Avoidance:
• Implementing MiraSAT® helps wafer fabs stay within air permit limits.
• It eliminates the risk of fire associated with IPA-soaked wipes and flammable solvents.
• Applications: Use MiraSAT® for wiping hi-vac process chambers, robotics, and sensitive components.
6. Static Dissipative for ESD-Sensitive Environments:
• MiraSAT® is static dissipative, making it safe for use in electrostatic-sensitive areas.
• Applications: Clean wafer handling systems, eliminate linear scratch defect events, and protect sensitive components.

Process Benefits:

• VOC Reduction: Protect VOC-sensitive fab modules (lithography, metrology, CVD) from solvent fumes.
• Abrasion Resistance: Industry-leading fabric minimizes fiber and particle excursions.
• Improved Equipment Uptime: MiraSAT®’s woven microfiber structure enables faster PMs and reduced downtime.
• Corrosion Prevention: Drip-free wetting minimizes corrosion damage to metal etch chambers.
• State-of-the-Art Processing: Foamtec’s facilities produce wipers optimized for advanced wafer fabs.
• Cross-Contamination Elimination: Double-bagged packs adhere to cleanroom entry protocols.

Environmental Health & Safety Benefits:

• Air Permit Compliance: Reduce fugitive VOC emissions by switching to MiraSAT®.
• Cost Savings: Eliminate flammable chemical storage and fire risks.
• Improved Biocompatibility: MiraSAT® is safe for both users and the environment.

Experience MiraSAT® Today: Contact us to request a sample of MiraSAT® Wipers. Elevate your cleanroom protocols and achieve superior results.

Disclaimer: MiraSAT® is a registered trademark of Foamtec International.