MiraSAT™ UPW / The VOC Free Cleanroom Wiper

Foamtec's HPM Technique

Combined with the UltraSOLV® ScrubPAD and Sponge, MiraSAT’s capabilities to dislodge, entrap and remove stubbornly adhered contamination reduces wiper usage, hazardous waste and equipment recovery time.

• For use in ISO Class 3 and higher cleanrooms.
• Cleaning of hi-vac process chambers and robotics in flat panel display and wafer fabs.
• Cleaning VOC sensitive process equipment in lithography, CVD and metrology modules.
• Cleaning baked-on resist and developer from lithography tracks.
• Final wipedown of sensitive components such as EFEM’s, electrostatic chucks, VAT valves and gas dispersion plates.
• Equipment PM’s and wet cleans where the elimination of VOC’s and flammable solvents are required.
• Ideal for cleaning wafer handling systems to eliminate linear scratch defect events.
• MiraSAT is static dissapative for use in ESD sensitive environments.

• Protects VOC sensitive fab modules such as lithography, metrology and CVD from solvent fumes.
• Industry leading abrasion resistant fabric reduces risks of fiber and particle excursions associated with fab wipers.
• Woven microfiber fabric enables improved contamination pickup leading to faster PM’s and improved equipment uptime.
• Even, consistent, drip-free wetting of surfaces enables excellent first pass cleaning and minimizes corrosion damage to metal etch chambers.
• Foamtec’s state of the art processing facilities produces a wiper optimized for use in the most advanced wafer fabs.
• Eliminates the risk of cross-contamination from soiled squirt bottles.

Environmental Constraints for the Semiconductor Industry are only Increasing

Implementing MiraSAT™ helps wafer fabs to remain within their air permit limits while making a step change improvement in environmental compliance and cost avoidance.

• Reduce flammable chemical storage, solvent squirt bottles, and eliminate the fire risk during cleanroom wipe downs.
• Eliminate fugitive VOC emissions and air permit implications associated with solvent wiping.
• Eliminate personnel exposure to isopropyl alcohol during cleanroom wipe downs.