MiraSAT™ 70/30 / Presaturated Cleanroom Microfiber Wipes for the Most Demanding Cleaning Tasks

Foamtec's HPM Technique

Combined with the UltraSOLV® ScrubPAD and Sponge, MiraSAT’s capabilities to dislodge, entrap and remove stubbornly adhered contamination reduces wiper usage, hazardous waste and equipment recovery time.

• For use in ISO Class 3 and higher cleanrooms.
• Improves post pm particle performance and recovery time in high vacuum process chambers.
• Cleaning VOC sensitive process equipment in lithography, CVD and metrology modules.
• Cleaning baked-on resist and developer from lithography tracks.
• Reduces foreign particle contamination on sensitive components such as EFEM’s, electrostatic chucks, VAT valves and gas dispersion plates.
• Ideal for cleaning wafer handling systems to eliminate linear scratch defect events.
• MiraSAT is static dissapative for use in ESD sensitive environments.

• Significantly reduces VOC’s for sensitive fab modules such as lithography, metrology and CVD.
• Unsurpassed abrasion & snag resistance minimizes scratch defects and foreign particle excursions associated with fab wipers.
• For equipment PM’s, the lightly dampened, woven microfiber fabric is production proven to improve equipment uptime and first pass qual rates.
• Foamtec’s state of the art ISO 5 processing facilities produces a wiper optimized for use in the most advanced wafer fabs.
• Minimizes tool down time caused by excess fluids in high vacuum chambers.

Environmental Constraints for the Semiconductor Industry are only Increasing

Implementing MiraSAT™ helps wafer fabs to remain within their air permit limits while making a step change improvement in environmental compliance and cost avoidance.

• Reduce flammable chemical storage, solvent squirt bottles, and handling of IPA in the cleanroom.
• Reduce fugitive VOC emissions and air permit implications associated with solvent wiping.
• Reduce personnel exposure to isopropyl alcohol during cleanroom wipe downs.