MiraSAT™ 70/30 H / Presaturated Cleanroom Microfiber Wipes Optimized for Cleaning and Disinfection Tasks

Foamtec's HPM Technique

Combined with the UltraSOLV® ScrubPAD and Sponge, MiraSAT’s capabilities to dislodge, entrap and remove stubbornly adhered contamination reduces wiper usage, hazardous waste and equipment recovery time.

• For use in ISO Class 3 and higher cleanrooms.
• Cleaning of laminar flow hoods, conveyors and tablet presses.
• Reduces metal-to-metal generated contamination that lead to dark particle defects.
• Cleaning baked-on resist and developer from lithography tracks.
• Increased levels of fluid allow for cleaning of hot high vacuum chambers.
• Unsurpassed abrasion & snag resistance minimizes scratch defects and particle excursions associated with fab wipers.
• Eliminates contamination risks associated with soiled IPA squirt bottles.
• For equipment PM’s, the lightly dampened, woven microfiber fabric is production proven to improve equipment uptime and first pass qual rates.
• Ideal for cleaning wafer handling systems to eliminate linear scratch defect events.
• MiraSAT is static dissapative for use in ESD sensitive environments.