Vacuum Chamber Cleaning Products

Vacuum Chamber Cleaning Products Enable Much Faster PM's and Reduced Particle Levels

UltraSOLV® Chamber Cleaning products enable Equipment Engineers in the semiconductor industry to quickly and thoroughly clean process deposition from a wide range of vacuum chambers. In 200mm and the most advanced 300mm wafer fabs, equipment wet cleans have been improved because the following items have been eliminated:

• Scotch-Brite™
• Commercial sand paper
• H2O2
• IPA
• Acetone

Click Here to Learn About VOC Free Cleaning

UltraSOLV® Chamber Cleaning Products are production proven to deliver improvements in the following metrics:

• Post PM Particle Counts
• Green-To-Green Time
• First Pass Qual Rates
• Hazardous waste and voc reductions
• Equipment availibility

Scotch-Brite™ is a trademark of 3M Corporation


EgroSCRUB®

An ergonomic handle used with ScrubDISKS® to remove process deposition from vacuum chambers.

 

ErgoWRENCH®

An ergonomic tool to remove process residue in hard to access sections of vacuum chambers.

PneuSCRUB®

A unique tool that enables automated removal of process residues.

ScrubBELT®

Interchangable abrasive belts used with ScrubWRIGHT™ to clean VAT valves and Electrostatic chucks.

ScrubDISKS®

Patented scrubbing tools for use in PM procedures on process equipment.

ScrubKITS®

Vacuum Chamber ScrubKITS® allow Equipment and Process Engineers to strictly control the items used to PM Vacuum Chambers.

ScrubPADS®

ScrubPADS® Quickly & Safely Remove Process Residues from Vacuum Chambers in the Semiconductor, LCD and Solar Cell Industries.

ScrubTIPS®

ScrubTIPS® are designed to remove processed residues from small, hard to access sections of vacuum chambers.

ScrubWRIGHT®

An ergonomic reusable tool employed with ScrubBELTS®