PneuSCRUB™ / Pneumatic Cleaning Tools for Vacuum Chamber Cleaning

Pneumatic Cleaning Tools for Vacuum Chamber Cleaning

PneuSCRUB™ Information

The PneuSCRUB device is a cleanroom rated pneumatically powered orbital sanding tool designed for use with the hook and loop (Velcro) Diamond Grit ScrubDISKS. The various options of 180 to 1350 Grit ScrubDISKS available for the PneuSCRUB allows technicians to rapidly achieve desired cleaning results on large surface areas with comfort and reduced ergonomic strain. PneuSCRUB dramatically reduces the time and labor input needed to accomplish the same surface scrubbing tasks that are currently carried out manually. PneuSCRUB is ideal for removing stubbornly adhered or legacy process deposition found on CMP, ALD, Ion Implant, Etch, and CVD tools.

Key Features

Improves Tool Availability. Reduces scrub-time by focusing Diamond ScrubPAD directly onto Heavy Deposition buildup, quickly taking chamber back to bare metal.
Helps Reduce Particles. Removes heavy deposition from areas critical to production, preventing unwanted flaking.
Safely Removes Deposition from Sensitive Areas. Able to focus Diamond ScrubPAD directly onto area of deposition to prevent excess wear of surrounding areas.
Wide Selection of Diamond ScrubPADS. Allows for quick removal of deposition from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear.

PneuSCRUB™ ScrubDISK®