UltraSOLV® Chamber Cleaning products enable Equipment Engineers in the semiconductor industry to quickly and thoroughly clean process by-product from a wide range of vacuum chambers. In 200mm and the most advanced 300mm wafer fabs, equipment wet cleans have been improved in the following manner:
• Scotch-Brite™ and related particle contamination have been eliminated from the fab
• Hazardous chemicals such as H2O2, IPA, and Acetone have significantly been reduced or eliminated
• MiraWIPE® and MiraSAT® improve Post PM particles and first-pass QUAL rates.
• MiraSAT® and MiraWIPE's tightly woven microfiber fabric eliminate the risk of fiber scratch defects when cleaning transfer robots, front end modules and end effectors
• MiraSAT® and MiraWIPE's excellent particle pickup and absorbency greatly reduce equipment pump down times especially for tools cleaned with Ultrapure Water
• Plasma Etch - Eliminate Scotch-Brite™, significantly reduce scrubbing time, innovative and safe cleaning of electrostatic chucks, improved PM QUAL rates due to reduced post PM Particles
• CVD - Diamond ScrubPADs allow equipment techs to remove process residue much more quickly with less contamination leading to shorter green-to-green times.
• Ion Implantation - Elimination of the safety hazards associated with H2O2 and Scotch-Brite™. Significantly reduced PM times due to more efficient scrubbing of process by-product and reduced pump down time.
• RTP - Eliminate the use of IPA, MiraWIPE® leaves the chamber dry with no IPA. Reduce PM times and improve particle performance.
• CMP - Eliminate Scotch-Brite™, Sahara foam can clean slurry of plastic parts without scratching. Improved PM times and improved particle performance.
Scotch-Brite™ is a trademark of 3M Corporation
Chamber Cleaning Abrasive Pads and Accessories for Equipment Engineers in the semiconductor industry to quickly and thoroughly clean process by-product from a wide range of vacuum chambers.
The premium cleanroom microfiber wiper designed for ISO Class 1-3 equipment cleaning applications
Microfiber cleaning performance brought to the world of swabs. Acetone compatible.
Foamtec's MiraSAT wipes are premium presaturated microfiber cleanroom wipers offering the most advanced cleanrooms unsurpassed cleaning performance.
Microfiber Cleanroom Gloves to Handle Process Chamber Components in Wafer Fabs Running Sub 10nm Nodes.