Vacuum Chamber Cleaning Products
Foamtec International Contamination Control Division
Vacuum Chamber Cleaning Products Enable Much Faster PM’s and Reduced Particle Levels
UltraSOLV® Chamber Cleaning products enable Equipment Engineers in the semiconductor industry to quickly and thoroughly clean process by-product from a wide range of vacuum chambers. In 200mm and the most advanced 300mm wafer fabs, equipment wet cleans have been improved in the following manner:
Scotch-Brite™ and related particle contamination have been eliminated from the fab
Hazardous chemicals such as H2O2, IPA, and Acetone have significantly been reduced or eliminated
MiraWIPE® and MiraSAT® improve Post PM particles and first-pass QUAL rates.
MiraSAT® and MiraWIPE's tightly woven microfiber fabric eliminate the risk of fiber scratch defects when cleaning transfer robots, front end modules and end effectors
MiraSAT® and MiraWIPE's excellent particle pickup and absorbency greatly reduce equipment pump down times especially for tools cleaned with Ultrapure Water
UltraSOLV® Chamber Cleaning Products are production proven to improve PM’s for the following process modules:
Plasma Etch - Eliminate Scotch-Brite™, significantly reduce scrubbing time, innovative and safe cleaning of electrostatic chucks, improved PM QUAL rates due to reduced post PM Particles
CVD - Diamond ScrubPADs allow equipment techs to remove process residue much more quickly with less contamination leading to shorter green-to-green times.
Ion Implantation - Elimination of the safety hazards associated with H2O2 and Scotch-Brite™. Significantly reduced PM times due to more efficient scrubbing of process by-product and reduced pump down time.
RTP - Eliminate the use of IPA, MiraWIPE® leaves the chamber dry with no IPA. Reduce PM times and improve particle performance.
CMP - Eliminate Scotch-Brite™, Sahara foam can clean slurry of plastic parts without scratching. Improved PM times and improved particle performance.
Scotch-Brite™ is a trademark of 3M Corporation.
Abrasive Pads and Accessories
Chamber Cleaning Abrasive Pads and Accessories for Equipment Engineers in the semiconductor industry to quickly and thoroughly clean process by-product from a wide range of vacuum chambers.
Microfiber Wipes
The premium cleanroom microfiber wiper designed for ISO Class 1-3 equipment cleaning applications.
Microfiber Swabs
Microfiber cleaning performance brought to the world of swabs. Acetone compatible.
Presaturated Microfiber Wipes
Foamtec’s MiraSAT wipes are premium presaturated microfiber cleanroom wipers offering the most advanced cleanrooms unsurpassed cleaning performance.
Microfiber Gloves
Microfiber Cleanroom Gloves to Handle Process Chamber Components in Wafer Fabs Running Sub 10nm Nodes.
Testimonials & Whitepapers
How to Clean AMAT Endura® Lift Pin Holes to Eliminate Post-PM Particle Adders
Why Endura PVD Chambers Fail Qualification Trapped process residues inside AMAT Endura® lift pin holes are a primary cause of erratic post-PM particle counts. Standard cleanroom swabs either lack the abrasion to dislodge sputtered metal deposits or shed fibers that...
How UV Residue Detection Improves Tablet Press Cleaning Validation
Many tablet press surfaces look clean before they are truly clean. Shiny stainless steel often hides thin organic films from powders, binders, lubricants, and product residues that are difficult to see under white light. That is why UV-assisted verification is...
How to Improve COP Cleaning Validation in GMP Facilities: Using Foamtec PolyCHECK® Wipers, Swabs & 365 nm UV Inspection to Reduce Downtime
In pharmaceutical and medical device manufacturing, Clean-Out-of-Place (COP) procedures remain essential for legacy equipment and removable product-contact parts that cannot be cleaned through automated CIP systems. Tablet presses, granulators, tumble coaters, fluid...
About Foamtec WCC
Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.