Cleaning Critical Surfaces in Cleanrooms
Abrasive Pads & Accessories
Vacuum Chamber Cleaning Products Enable Much Faster PM's and Reduced Particle Levels
UltraSOLV® Abrasive Cleaning Pads enable Equipment Engineers in the semiconductor industry to quickly and thoroughly clean process by-products from a wide range of vacuum chambers. UltraSOLV® Abrasive products are production-proven in silicon and compound wafer fabs to eliminate Scotch-Brite™ particles and improve equipment green-to-green time.
Contact Foamtec's Equipment Engineers for PM procedures for specific process equipment.
UltraSOLV® Chamber Cleaning Products are production proven to improve PM's for the following process modules:
• Plasma Etch - Eliminate Scotch-Brite™, significantly reduce scrubbing time, innovative and safe cleaning of electrostatic chucks, improved PM QUAL rates due to reduced post PM Particles.
• CVD - Diamond ScrubPADs allow equipment techs to remove process residue much more quickly with less contamination leading to shorter green-to-green times.
• Ion Implantation - Elimination of the safety hazards associated with H2O2 and Scotch-Brite™. Significantly reduced PM times due to more efficient scrubbing of process by-product and reduced pump down time.
• CMP - Eliminate Scotch-Brite™, Sahara foam can clean slurry of plastic parts without scratching. Improved PM times and improved particle performance.
Scotch-Brite™ is a trademark of 3M Corporation
ErgoSCRUB®
An ergonomic handle used with ScrubDISKS® to remove process deposition from vacuum chambers.
ErgoWRENCH®
An ergonomic tool to remove process residue in hard to access sections of vacuum chambers.
PneuSCRUB®
A unique tool that enables automated removal of process residues.
ScrubBELT®
Interchangable abrasive belts used with ScrubWRIGHT™ to clean VAT valves and Electrostatic chucks.
ScrubCLEAN® Sponges
ScrubCLEAN® abrasive sponges are constructed from plastic particles that are adhered to the sponge with a polyurethane polymer, making them ideal for applications where it is critical to reduce particles and fibers generated by the abrasive surfaces.
ScrubDISKS®
Patented scrubbing tools for use in PM procedures on process equipment.
ScrubKITS®
Vacuum Chamber ScrubKITS® allow Equipment and Process Engineers to strictly control the items used to PM Vacuum Chambers.
ScrubPADS®
ScrubPADS® Quickly & Safely Remove Process Residues from Vacuum Chambers in the Semiconductor, LCD and Solar Cell Industries.
ScrubTIPS®
ScrubTIPS® are designed to remove processed residues from small, hard to access sections of vacuum chambers.
ScrubWRIGHT®
An ergonomic reusable tool employed with ScrubBELTS®