UltraSOLV® Abrasive Cleaning Pads enable Equipment Engineers in the semiconductor industry to quickly and thoroughly clean process by-products from a wide range of vacuum chambers. UltraSOLV® Abrasive products are production-proven in silicon and compound wafer fabs to eliminate Scotch-Brite™ particles and improve equipment green-to-green time.
Contact Foamtec's Equipment Engineers for PM procedures for specific process equipment.
• Plasma Etch - Eliminate Scotch-Brite™, significantly reduce scrubbing time, innovative and safe cleaning of electrostatic chucks, improved PM QUAL rates due to reduced post PM Particles.
• CVD - Diamond ScrubPADs allow equipment techs to remove process residue much more quickly with less contamination leading to shorter green-to-green times.
• Ion Implantation - Elimination of the safety hazards associated with H2O2 and Scotch-Brite™. Significantly reduced PM times due to more efficient scrubbing of process by-product and reduced pump down time.
• CMP - Eliminate Scotch-Brite™, Sahara foam can clean slurry of plastic parts without scratching. Improved PM times and improved particle performance.
Scotch-Brite™ is a trademark of 3M Corporation
An ergonomic handle used with ScrubDISKS® to remove process deposition from vacuum chambers.
An ergonomic tool to remove process residue in hard to access sections of vacuum chambers.
A unique tool that enables automated removal of process residues.
Interchangable abrasive belts used with ScrubWRIGHT™ to clean VAT valves and Electrostatic chucks.
ScrubCLEAN® abrasive sponges are constructed from plastic particles that are adhered to the sponge with a polyurethane polymer, making them ideal for applications where it is critical to reduce particles and fibers generated by the abrasive surfaces.
Patented scrubbing tools for use in PM procedures on process equipment.
Vacuum Chamber ScrubKITS® allow Equipment and Process Engineers to strictly control the items used to PM Vacuum Chambers.
ScrubPADS® Quickly & Safely Remove Process Residues from Vacuum Chambers in the Semiconductor, LCD and Solar Cell Industries.
ScrubTIPS® are designed to remove processed residues from small, hard to access sections of vacuum chambers.
An ergonomic reusable tool employed with ScrubBELTS®