PneuSCRUB™ / Pneumatic Cleaning Tools for Vacuum Chamber Cleaning

Pneumatic Cleaning Tools for Vacuum Chamber Cleaning

PneuSCRUB™ Information

Request Information PneuSCRUB Datasheet Reduce Ergonomic Issues and Scrubbing Time for Annual Preventative Maintanence Wet Cleans[Video] Reduce Ion Implant Wet Clean Time[Video]

The PneuSCRUB™ device is a cleanroom rated pneumatically powered orbital sanding tool designed for use with the hook and loop (Velcro) Diamond Grit ScrubPADS for both wet and dry equipment cleaning SOP’s. The various options of 140 to 1350 Grit ScrubPADS available for the PneuSCRUB™ allows technicians to rapidly achieve desired cleaning results on large surface areas with comfort and reduced ergonomic strain. PneuSCRUB™ dramatically reduces the time and labor input needed to accomplish the same surface scrubbing tasks that are currently carried out manually. PneuSCRUB™ is ideal for removing stubbornly adhered or legacy process deposition found on CMP, ALD, Ion Implant, Etch, and CVD tools. The Sahara Triangular Buffing Pad attachment is ideal for removing hardened slurry from plastic components in CMP tools.
Available with foam backing in order to conform to cylindrical and edged surfaces.

Key Features

• Improves Tool Availability. Reduces scrub-time by focusing Diamond ScrubPAD directly onto Heavy Deposition buildup, quickly returning surfaces back to a like-new condition.
• Reduces Particle Generation.y. Diamond & Sahara Foam scrubbing products eliminate metallic particulate shedding risks observed with competing abrasives, while providing superior cleaning efficiency and service life.
• Safely Removes Deposition from Sensitive Areas. Enables customers to select ideal products for any surface cleaning need ranging from quartz to stainless steel, while minimizing labor requirements and tool surface wear.

PneuSCRUB™ Handheld Triangular Scrubbing Tool

FT965
PneuScrub Handheld Triangular Scrubbing Tool with Hook and Loop Attachment System with Ø1.25” Vacuum exhaust port. 1/4” NPT Air Inlet Fitting Facilities Reqs: 80psi Supply Pressure, 9 CFM

 

FT966
PneuScrub Handheld Triangular Scrubbing Tool with Hook and Loop Attachment System w/o Vacuum exhaust port. 1/4” NPT Air Inlet Fitting Facilities Reqs: 80psi Supply Pressure, 9 CFM

 

PneuSCRUB™ ScrubPADS® w/ 4 Holes and Foam & Loop Backing

HS4518DT41-1 | HS4518DT42-1
180 Diamond Grit PneuSCRUB Triangular Pad with foam Backing (Hook and Loop Attachment System)
Size: 3.875” x 2.75”
Left PN: 0.25” Thick Foam
Right PN: 0.5” Thick Foam

 

HS4528DT41-1 | HS4528DT42-1
280 Diamond Grit PneuSCRUB Triangular Pad with foam Backing (Hook and Loop Attachment System)
Size: 3.875” x 2.75”
Left PN: 0.25” Thick Foam
Right PN: 0.5” Thick Foam

 

HS4536DT41-1 | HS4536DT42-1
360 Diamond Grit PneuSCRUB Triangular Pad with foam Backing (Hook and Loop Attachment System)
Size: 3.875” x 2.75”
Left PN: 0.25” Thick Foam
Right PN: 0.5” Thick Foam

 

HS4580DT41-1 | HS4580DT42-1
800 Diamond Grit PneuSCRUB Triangular Pad with foam Backing (Hook and Loop Attachment System)
Size: 3.875” x 2.75”
Left PN: 0.25” Thick Foam
Right PN: 0.5” Thick Foam

 

HS4824T4
Sahara Scrubbing Pad used in conjunction with PneuSCRUB™ for removing hardened CMP slurry from large tool surfaces
Size: 3.875" x 2.75"

 

PneuSCRUB™ ScrubPADS® w/ 4 Holes and Loop Backing

HT4514DT4-1
140 Diamond Grit PneuSCRUB Triangular Pad (Hook and Loop Attachment System)
Size: 3.875” x 2.75”
Thickness: 0.078”

 

HT4518DT4-1
180 Diamond Grit PneuSCRUB Triangular Pad (Hook and Loop Attachment System)
Size: 3.875” x 2.75”
Thickness: 0.078”

 

HT4528DT4-1
280 Diamond Grit PneuSCRUB Triangular Pad (Hook and Loop Attachment System)
Size: 3.875” x 2.75”
Thickness: 0.078”

 

HT4536DT4-1
360 Diamond Grit PneuSCRUB Triangular Pad (Hook and Loop Attachment System)
Size: 3.875” x 2.75”
Thickness: 0.078

 

HT4580DT4-1
800 Diamond Grit PneuSCRUB Triangular Pad (Hook and Loop Attachment System)
Size: 3.875” x 2.75”
Thickness: 0.078”

 

HT4513PDT4-1
1350 Diamond Grit PneuSCRUB Triangular Pad (Hook and Loop Attachment System)
Size: 3.875” x 2.75”
Thickness: 0.078”