PneuSCRUB™
Pneumatic Cleaning Tools for Vacuum Chamber Cleaning
The PneuSCRUB™ device is a cleanroom rated pneumatically powered orbital sanding tool designed for use with the hook and loop (Velcro) Diamond Grit ScrubPADS for both wet and dry equipment cleaning SOP’s. The various options of 140 to 1350 Grit ScrubPADS available for the PneuSCRUB™ allows technicians to rapidly achieve desired cleaning results on large surface areas with comfort and reduced ergonomic strain. PneuSCRUB™ dramatically reduces the time and labor input needed to accomplish the same surface scrubbing tasks that are currently carried out manually. PneuSCRUB™ is ideal for removing stubbornly adhered or legacy process deposition found on CMP, ALD, Ion Implant, Etch, and CVD tools. The Sahara Triangular Buffing Pad attachment is ideal for removing hardened slurry from plastic components in CMP tools.
Key Features
Improves Tool Availability.
Reduces Particle Generation.
Safely Removes Deposition from Sensitive Areas.
Product | Description | Quantity | Details |
|---|---|---|---|
PneuScrub Handheld Triangular Scrubbing Tool with Hook and Loop Attachment System with Ø1.25” Vacuum exhaust port. 1/4” NPT Air Inlet Fitting Facilities Reqs: 80psi Supply Pressure, 9 CFM |
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PneuScrub Handheld Triangular Scrubbing Tool with Hook and Loop Attachment System w/o Vacuum exhaust port. 1/4” NPT Air Inlet Fitting Facilities Reqs: 80psi Supply Pressure, 9 CFM |
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180 Diamond Grit PneuSCRUB Triangular Pad with foam Backing Size: 3.875” x 2.75” Thickness: 0.25" |
Quantity/Pack: 1 Pad |
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180 Diamond Grit PneuSCRUB Triangular Pad with foam Backing (Hook and Loop Attachment System) Size: 3.875” x 2.75” Thickness: 0.50" |
Quantity/Pack: 1 Pad |
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280 Diamond Grit PneuSCRUB Triangular Pad with foam Backing (Hook and Loop Attachment System) Size: 3.875” x 2.75” Thickness: 0.25" |
Quantity/Pack: 1 Pad |
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280 Diamond Grit PneuSCRUB Triangular Pad with foam Backing (Hook and Loop Attachment System) Size: 3.875” x 2.75” Thickness: 0.50" |
Quantity/Pack: 1 Pad |
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360 Diamond Grit PneuSCRUB Triangular Pad with foam Backing (Hook and Loop Attachment System) Size: 3.875” x 2.75” Thickness: 0.25" |
Quantity/Pack: 1 Pad |
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360 Diamond Grit PneuSCRUB Triangular Pad with foam Backing (Hook and Loop Attachment System) Size: 3.875” x 2.75” Thickness: 0.50" |
Quantity/Pack: 1 Pad |
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800 Diamond Grit PneuSCRUB Triangular Pad with foam Backing (Hook and Loop Attachment System) Size: 3.875” x 2.75” Thickness: 0.25" |
Quantity/Pack: 1 Pad |
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800 Diamond Grit PneuSCRUB Triangular Pad with foam Backing (Hook and Loop Attachment System) Size: 3.875” x 2.75” Thickness: 0.50" |
Quantity/Pack: 1 Pad |
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Sahara Scrubbing Pad used in conjunction with PneuSCRUB™ for removing hardened CMP slurry from large tool surfaces Size: 3.875” x 2.75” |
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Triangle Diamond (Dia) ScrubDISK® 4 holes with Loop Backing, for use with PneuSCRUB Triangle Sander 1350 Diamond Grit PneuSCRUB Triangular Pad (Hook and Loop Attachment System) Size: 3.875” x 2.75” Thickness: 0.078” |
Quantity/Pack: 25 disks per case Packs/Case: 1 disk per pack |
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140 Diamond Grit PneuSCRUB Triangular Pad (Hook and Loop Attachment System) Size: 3.875” x 2.75” Thickness: 0.078” |
Quantity/Pack: 1 disk per pack Packs/Case: 25 |
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180 Diamond Grit PneuSCRUB Triangular Pad (Hook and Loop Attachment System) Size: 3.875” x 2.75” Thickness: 0.078” |
Quantity/Pack: 1 disk per pack Packs/Case: 25 |
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280 Diamond Grit PneuSCRUB Triangular Pad (Hook and Loop Attachment System) Size: 3.875” x 2.75” Thickness: 0.078” |
Quantity/Pack: 1 disk per pack Packs/Case: 25 |
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360 Diamond Grit PneuSCRUB Triangular Pad (Hook and Loop Attachment System) Size: 3.875” x 2.75” Thickness: 0.078" |
Quantity/Pack: 1 disk per pack Packs/Case: 25 |
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800 Diamond Grit PneuSCRUB Triangular Pad (Hook and Loop Attachment System) Size: 3.875” x 2.75” Thickness: 0.078” |
Quantity/Pack: 1 disk per pack Packs/Case: 25 |
About Foamtec WCC
Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.