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ScrubDISK®

Reduce Cleaning Times on Vacuum Chambers with Heavy Build-Up of Process Residue

Vacuum Chamber ScrubDISKS® are patented scrubbing tools for use in PM procedures on process equipment in Wafer Fab, flat panel display, optical component and hard disk drive industries. ScrubDISKs® are widely used in 200mm and 300mm fabs to PM or wet clean CVD, PECVD, dry etch, PVD and ion implant tools. ScrubDISKs® are processed to be extremely low in metals and mobile ions and are available in a wide variety of diamond & silicon carbide abrasives to enable safe and efficient wet clean BKMs. ScrubDISKs®, used in conjunction with UltraSOLV® Sponges, Wipers, and Swabs, reduces cleaning times, pump down times and contamination levels for critical process tools. ScrubDISKS® are designed to be used with ErgoSCRUB® Handles.

Key Features

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Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear.
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The fiber-free construction of ScrubDISKS® greatly reduces particle levels in cleaned Vacuum Chambers.
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By using washed abrasives, harmful ionic residues are minimized.
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Unique bonding technology minimizes the release of abrasive particles leading to cleaner Vacuum Chamber PM procedures.
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Enables the elimination of H2O2 from PMs, leading to greatly reduced recovery times.

3.5″ ScrubDISKS® w/ Velcro Loop

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Product
Description
Quantity
Details

140 Diamond Grit with Loop Back


Thickness: 0.065"
Quantity/Pack:
1 ScrubDISK

180 Diamond Grit with Loop Back


Thickness: 0.058"
Quantity/Pack:
1 ScrubDISK

220 Diamond Grit with Loop Back


Thickness: 0.053"
Quantity/Pack:
1 ScrubDISK

280 Diamond Grit with Loop Back


Thickness: 0.055"
Quantity/Pack:
1 ScrubDISK

360 Diamond Grit with Loop Back


Thickness: 0.050"
Quantity/Pack:
1 ScrubDISK

800 Diamond Grit with Loop Back


Thickness: 0.056"
Quantity/Pack:
1 ScrubDISK

1350 Diamond Grit with Loop Back


Thickness: 0.045"
Quantity/Pack:
1 ScrubDISK

2000 Diamond Grit with Loop Back


Thickness: 0.054"
Quantity/Pack:
1 ScrubDISK

3000 Diamond Grit with Loop Back


Thickness: 0.052"
Quantity/Pack:
1 ScrubDISK

4000 Diamond Grit with Loop Back


Thickness: 0.049"
Quantity/Pack:
1 ScrubDISK

3.5″ ScrubDISKS® w/ Pressure Sensitive Adhesive (PSA)

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Product
Description
Quantity
Details

140 Diamond Grit with PSA Back


Thickness: 0.035"
Quantity/Pack:
1 ScrubDISK

180 Diamond Grit with PSA Back


Thickness: 0.030"
Quantity/Pack:
1 ScrubDISK

220 Diamond Grit with PSA Bvack


Thickness: 0.029"
Quantity/Pack:
1 ScrubDISK

280 Diamond Grit with PSA Back


Thickness: 0.027"
Quantity/Pack:
1 ScrubDISK

360 Diamond Grit with PSA Back


Thickness: 0.029"
Quantity/Pack:
1 ScrubDISK

800 Diamond Grit with PSA Back


Thickness: 0.020"
Quantity/Pack:
1 ScrubDISK

1350 Diamond Grit with PSA Back


Thickness: 0.020"
Quantity/Pack:
1 ScrubDISK

2000 Diamond Grit with PSA Back


Thickness: 0.020"
Quantity/Pack:
1 ScrubDISK

5″ ScrubDISKS® w/ Velcro

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Product
Description
Quantity
Details

140 Diamond Grit, No Holes


Thickness: 0.065"
Quantity/Pack:
1 ScrubDISK

140 Diamond Grit with 8 Holes


Thickness: 0.065"
Quantity/Pack:
1 ScrubDISK

280 Diamond Grit with 5 Holes


Thickness: 0.055"
Quantity/Pack:
1 ScrubDISK

360 Diamond Grit with 5 Holes


Thickness: 0.05"
Quantity/Pack:
1 ScrubDISK

360 Diamond Grit with 8 Holes


Thickness: 0.05"
Quantity/Pack:
1 ScrubDISK

800 Diamond Grit, no Holes


Thickness: 0.056"
Quantity/Pack:
1 ScrubDISK

800 Diamond Grit with 5 Holes


Thickness: 0.056"
Quantity/Pack:
1 ScrubDISK

800 Diamond Grit with 8 Holes


Thickness: 0.056"
Quantity/Pack:
1 ScrubDISK

1350 Diamond Grit with 5 Holes


Thickness: 0.045"
Quantity/Pack:
1 ScrubDISK

1350 Diamond Grit with 8 Holes


Thickness: 0.045"
Quantity/Pack:
1 ScrubDISK

3000 Diamond Grit ScrubDISK®


Thickness: 0.052"

1350 Diamond


Quantity/Pack:
1 disk per pack
Packs/Case:
20 disks per case

280 Diamond


Quantity/Pack:
1 disk per pack
Packs/Case:
20 disks per case

280 Diamond


Quantity/Pack:
1 disk per pack
Packs/Case:
20 disks per case

360 Diamond


Quantity/Pack:
1 disk per pack
Packs/Case:
20 disks per case

About Foamtec WCC

Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.

 

Contact Us

Address

6575 IH-35 North
Waco, TX 76705