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ScrubDISK®

Reduce Cleaning Times on Vacuum Chambers with Heavy Build-Up of Process Residue

Vacuum Chamber ScrubDISKS® are patented scrubbing tools for use in PM procedures on process equipment in Wafer Fab, flat panel display, optical component and hard disk drive industries. ScrubDISKs® are widely used in 200mm and 300mm fabs to PM or wet clean CVD, PECVD, dry etch, PVD and ion implant tools. ScrubDISKs® are processed to be extremely low in metals and mobile ions and are available in a wide variety of diamond & silicon carbide abrasives to enable safe and efficient wet clean BKMs. ScrubDISKs®, used in conjunction with UltraSOLV® Sponges, Wipers, and Swabs, reduces cleaning times, pump down times and contamination levels for critical process tools. ScrubDISKS® are designed to be used with ErgoSCRUB® Handles.

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Datasheet

Key Features

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Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear.
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The fiber-free construction of ScrubDISKS® greatly reduces particle levels in cleaned Vacuum Chambers.
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By using washed abrasives, harmful ionic residues are minimized.
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Unique bonding technology minimizes the release of abrasive particles leading to cleaner Vacuum Chamber PM procedures.
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Enables the elimination of H2O2 from PMs, leading to greatly reduced recovery times.

3.5″ ScrubDISKS® w/ Velcro Loop

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Product
Description
Quantity
Details
HT4514DC3

140 Diamond Grit with Loop Back


Thickness: 0.065"
Quantity/Pack:
1 ScrubDISK
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HT4518DC3

180 Diamond Grit with Loop Back


Thickness: 0.058"
Quantity/Pack:
1 ScrubDISK
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HT4522DC3

220 Diamond Grit with Loop Back


Thickness: 0.053"
Quantity/Pack:
1 ScrubDISK
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HT4528DC3

280 Diamond Grit with Loop Back


Thickness: 0.055"
Quantity/Pack:
1 ScrubDISK
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HT4536DC3

360 Diamond Grit with Loop Back


Thickness: 0.050"
Quantity/Pack:
1 ScrubDISK
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HT4580DC3

800 Diamond Grit with Loop Back


Thickness: 0.056"
Quantity/Pack:
1 ScrubDISK
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HT4513PDC3

1350 Diamond Grit with Loop Back


Thickness: 0.045"
Quantity/Pack:
1 ScrubDISK
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HT4520PDC3

2000 Diamond Grit with Loop Back


Thickness: 0.054"
Quantity/Pack:
1 ScrubDISK
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HT4530PDC3

3000 Diamond Grit with Loop Back


Thickness: 0.052"
Quantity/Pack:
1 ScrubDISK
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HT4540PDC3

4000 Diamond Grit with Loop Back


Thickness: 0.049"
Quantity/Pack:
1 ScrubDISK
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3.5″ ScrubDISKS® w/ Pressure Sensitive Adhesive (PSA)

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Product
Description
Quantity
Details
HT4514DC3G

140 Diamond Grit with PSA Back


Thickness: 0.035"
Quantity/Pack:
1 ScrubDISK
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HT4518DC3G

180 Diamond Grit with PSA Back


Thickness: 0.030"
Quantity/Pack:
1 ScrubDISK
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HT4522DC3G

220 Diamond Grit with PSA Bvack


Thickness: 0.029"
Quantity/Pack:
1 ScrubDISK
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HT4528DC3G

280 Diamond Grit with PSA Back


Thickness: 0.027"
Quantity/Pack:
1 ScrubDISK
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HT4536DC3G

360 Diamond Grit with PSA Back


Thickness: 0.029"
Quantity/Pack:
1 ScrubDISK
Request a Sample
HT4580DC3G

800 Diamond Grit with PSA Back


Thickness: 0.020"
Quantity/Pack:
1 ScrubDISK
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HT4513PDC3G

1350 Diamond Grit with PSA Back


Thickness: 0.020"
Quantity/Pack:
1 ScrubDISK
Request a Sample
HT4520PDC3G

2000 Diamond Grit with PSA Back


Thickness: 0.020"
Quantity/Pack:
1 ScrubDISK
Request a Sample

5″ ScrubDISKS® w/ Velcro

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Product
Description
Quantity
Details
HT4514DC5

140 Diamond Grit, No Holes


Thickness: 0.065"
Quantity/Pack:
1 ScrubDISK
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HT4514DC5Z2

140 Diamond Grit with 8 Holes


Thickness: 0.065"
Quantity/Pack:
1 ScrubDISK
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HT4528DC5Z

280 Diamond Grit with 5 Holes


Thickness: 0.055"
Quantity/Pack:
1 ScrubDISK
Request a Sample
HT4536DC5Z

360 Diamond Grit with 5 Holes


Thickness: 0.05"
Quantity/Pack:
1 ScrubDISK
Request a Sample
HT4536DC5Z2

360 Diamond Grit with 8 Holes


Thickness: 0.05"
Quantity/Pack:
1 ScrubDISK
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HT4580DC5

800 Diamond Grit, no Holes


Thickness: 0.056"
Quantity/Pack:
1 ScrubDISK
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HT4580DC5Z

800 Diamond Grit with 5 Holes


Thickness: 0.056"
Quantity/Pack:
1 ScrubDISK
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HT4580DC5Z2

800 Diamond Grit with 8 Holes


Thickness: 0.056"
Quantity/Pack:
1 ScrubDISK
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HT4513PDC5Z

1350 Diamond Grit with 5 Holes


Thickness: 0.045"
Quantity/Pack:
1 ScrubDISK
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HT4513PDC5Z2

1350 Diamond Grit with 8 Holes


Thickness: 0.045"
Quantity/Pack:
1 ScrubDISK
Request a Sample
HT4530PDC5

3000 Diamond Grit ScrubDISK®


Thickness: 0.052"
Request a Sample
HT4513PDC5

1350 Diamond


Quantity/Pack:
1 disk per pack
Packs/Case:
20 disks per case
Request a Sample
HT4528DC5

280 Diamond


Quantity/Pack:
1 disk per pack
Packs/Case:
20 disks per case
Request a Sample
Placeholder
HT4528DC5Z2

280 Diamond


Quantity/Pack:
1 disk per pack
Packs/Case:
20 disks per case
Request a Sample
HT4536DC5

360 Diamond


Quantity/Pack:
1 disk per pack
Packs/Case:
20 disks per case
Request a Sample

About Foamtec WCC

Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.

 

Contact Us

Address

6575 IH-35 North
Waco, TX 76705

Phone

(760) 599-7160