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ScrubKITS™

Vacuum Chamber Cleaning Kit

Vacuum Chamber PM ScrubKITS™ are pre-packed maintenance kits containing all the tools necessary to safely PM CVD, Plasma Etch, PVD, PECVD, MOCVD, Ion Implant and ALD Vacuum Chambers. Vacuum Chamber ScrubKITS™ allow Equipment and Process Engineers to strictly control the items used to PM Vacuum Chambers.

Key Features

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Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear.
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The fiber-free construction of ScrubDISKS® greatly reduces particle levels in cleaned Vacuum Chambers.
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By using washed abrasives, harmful ionic residues are minimized.
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Unique bonding technology minimizes the release of abrasive particles leading to cleaner Vacuum Chamber PM procedures.
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Enables the elimination of H2O2 from PMs, leading to greatly reduced recovery times.
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Removes rust from 5-10m² of stainless steel and includes tools to scrub small recessed areas such as 90 degree angles.

(1) 280 Diamond Grit ScrubPAD®
(1) 360 Diamond Grit ScrubPAD®
(1) 1350 Diamond Grit ScrubPAD®
(1) 2000 Diamond Grit ScrubPAD®
(1) 1500 Silicon Carbide Grit ScrubPAD®
(1) 280 Diamond Grit ScrubBELT®
(1) 360 Diamond Grit ScrubBELT®
(1) FTPEN Tool for ScrubBELT®
(1) HS4854 Sahara® Sponge
(1) HT4754 UltraSOLV® Sponge
(2) HT5790S-5 MiraWIPE® Wiper (10 Wipers)


Quantity/Pack:
1
Packs/Case:
10

Removes rust from 10-20m² of stainless steel and includes tools to scrub small recessed areas such as 90 degree angles.

(1) 280 Diamond Grit ScrubPAD®
(1) 1350 Diamond Grit ScrubPAD®
(1) 2000 Diamond Grit ScrubPAD®
(1) 1500 Silicon Carbide Grit ScrubPAD®
(2) 280 Diamond Grit ScrubDISK®
(2) 360 Diamond Grit ScrubDISK®
(2) 800 Diamond Grit ScrubDISK®
(2) 1350 Diamond Grit ScrubDISK®
(2) 2000 Diamond Grit ScrubDISK®
(1) 1500 Silicon Carbide Grit ScrubDISK®
(1) FT901 Soft Handle ErgoSCRUB®
(1) FT951 Firm Handle ErgoSCRUB®
(1) 280 Diamond Grit ScrubBELT®
(1) 800 Diamond Grit ScrubBELT®
(1) FTPEN Tool for ScrubBELT®
(1) HS4854 Sahara® Sponge
(2) HT4754 UltraSOLV® Sponge
(1) HT5790S-25 MiraWIPE® (25 Wipers)


ScrubPAD® Maintenance Kit

(5) HT4528D | 280 Diamond Grit ScrubPAD®
(10) HT4536D | 360 Diamond Grit ScrubPAD®
(10) HT45613PD | 1350 Diamond Grit ScrubPAD®
(5) HT4520PD | 2000 Diamond Grit ScrubPAD®
(5) HT4515P | 1500 Silicon Carbide Grit ScrubPAD®
(10) HT4754 | UltraSOLV® Sponge
(5) HT5790S-25 | MiraWIPE® Wiper (125 Wipers)


ScrubDISK® Maintenance Kit

(5) HT4528DC3 | 280 Diamond Grit ScrubDISK®
(10) HT4536DC3 | 360 Diamond Grit ScrubDISK®
(10) HT4513PDC3 | 1350 Diamond Grit ScrubDISK®
(5) HT4520PDC3 | 2000 Diamond Grit ScrubDISK®
(5) HT4515DC3 | 1500 Silicon Carbide Grit ScrubDISK®
(1) FT951 | Firm Handle ErgoSCRUB®
(10) HT4754 | UltraSOLV® Sponge
(5) HT5790S-25 | MiraWIPE® Wiper (125 Wipers)


ScrubPAD® Stain Removal Kit

(10) HT4580D | 800 Diamond Grit ScrubPAD®
(30) HT4513PD | 1350 Diamond Grit ScrubPAD®
(20) HT4520PD | 2000 Diamond Grit ScrubPAD®
(20) HT4530PD | 3000 Diamond Grit ScrubPAD®
(20) HT4540PD | 4000 Diamond Grit ScrubPAD®


ScrubDISK® Stain Removal Kit

(10) HT4580DC3 | 800 Diamond Grit ScrubDISK®
(30) HT4513PDC3 | 1350 Diamond Grit ScrubDISK®
(20) HT4520PDC3 | 2000 Diamond Grit ScrubDISK®
(20) HT4530PDC3 | 3000 Diamond Grit ScrubDISK®
(20) HT4540PDC3 | 4000 Diamond Grit ScrubDISK®


ScrubPAD® Refill Kit

(20) HT4528D | 280 Diamond Grit ScrubPAD®
(20) HT4536D | 360 Diamond Grit ScrubPAD®
(10) HT4580D | 800 Diamond Grit ScrubPAD®
(20) HT4513PD | 1350 Diamond Grit ScrubPAD®
(20) HT4520PD | 2000 Diamond Grit ScrubPAD®
(10) HT4515P | 1500 Silicon Carbide Grit ScrubPAD®


ScrubDISK® Refill Kit

(20) HT4528DC3 | 280 Diamond Grit ScrubDISK®
(20) HT4536DC3 | 360 Diamond Grit ScrubDISK®
(10) HT4580DC3 | 800 Diamond Grit ScrubDISK®
(20) HT4513PDC3 | 1350 Diamond Grit ScrubDISK®
(20) HT4520PDC3 | 2000 Diamond Grit ScrubDISK®
(10) HT4515PC3 | 1500 Silicon Carbide Grit ScrubDISK®


ScrubDISK® Refill Kit w/ 5 Holes

(20) 280 Diamond Grit ScrubDISK®
(20) 360 Diamond Grit ScrubDISK®
(10) 800 Diamond Grit ScrubDISK®
(20) 1350 Diamond Grit ScrubDISK®
(20) 2000 Diamond Grit ScrubDISK®
(10) 1500 Silicon Carbide Grit ScrubDISK®


ScrubDISK® Refill Kit w/ 8 Holes

(20) 280 Diamond Grit ScrubDISK®
(20) 360 Diamond Grit ScrubDISK®
(10) 800 Diamond Grit ScrubDISK®
(20) 1350 Diamond Grit ScrubDISK®
(20) 2000 Diamond Grit ScrubDISK®
(10) 1500 Silicon Carbide Grit ScrubDISK®


About Foamtec WCC

Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.

 

Contact Us

Address

6575 IH-35 North
Waco, TX 76705