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ScrubPAD®

Foamtec International Contamination Control Division

Reduce Cleaning Time & Post PM Particle Levels in Hi-Vacuum Chambers

ScrubPADS® are patented wet-dry coated abrasives designed to clean residue, rust and by-product from process tools in semiconductor wafer fabs. ScrubPADS® are widely used in 200mm and 300mm fabs to PM or wet clean CVD, PECVD, dry etch, PVD and ion implant tools. ScrubPADS® are processed to be extremely low in metals and mobile ions and are available in a wide variety of diamond, silicon carbide and aluminum oxide abrasives to enable safe and efficient wet clean BKMs. ScrubPADS®, used in conjunction with UltraSOLV® Sponges, Wipers, and Swabs, reduce cleaning times, pump down times and contamination levels for critical process tools.

ScrubPADs are now available for ErgoWRENCH and ScrubWRIGHT to speed up cleaning for scratch sensitive and hard to reach areas of Vacuum Chambers.

Key Features

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Wide grit selection allows for quick removal of process-induced residue from aluminum, stain less steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear.
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The fiber-free construction of ScrubPADs greatly reduces particle levels in cleaned tools.
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By using washed abrasives, harmful ionic residues are minimized.
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Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures.
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Enables the elimination of H2O2 from PMs, which greatly reduces recovery times.
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Clean and unload with UltraSOLV® Sponge for longer life.

ScrubPADS® w/ Diamond Grit w/ 0.078″ Thickness

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Product
Description
Quantity
Details

140 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

180 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

220 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

280 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

360 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

360 Diamond Grit With Slits


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

400 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

800 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

1350 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

1350 Diamond Grit with Slits


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

2000 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

3000 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

4000 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

ScrubPADS® w/ Silicon Carbide (SiC) Grit w/ 0.078″ Thickness

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Product
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100 SiC Grit


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

100 SiC Grit ScrubPAD® w/ Slits


Size: 3" x 4"

220 SiC Grit


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

280 SiC Grit


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

280 SiC Grit


Size: 4 x 6 | .20 x 10 x 15
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

400 SiC Grit


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

400 SiC Grit with Slits


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

600 SiC Grit


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

600 SiC Grit with Slits


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

800 SiC Grit


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

1200 SiC Grit


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

1200 SiC Grit with Slits


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

1500 SiC Grit


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

ScrubPADS® w/ Aluminum Oxide (AO) Grit w/ 0.078″ Thickness

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Product
Description
Quantity
Details

800 AO Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

1200 AO Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

2000 Aluminum Oxide Grit ScrubPAD®


Size: 3" x 4"

4000 AO Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs

About Foamtec WCC

Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.

 

Contact Us

Address

6575 IH-35 North
Waco, TX 76705