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ScrubPAD®

Foamtec International Contamination Control Division

Reduce Cleaning Time & Post PM Particle Levels in Hi-Vacuum Chambers

ScrubPADS® are patented wet-dry coated abrasives designed to clean residue, rust and by-product from process tools in semiconductor wafer fabs. ScrubPADS® are widely used in 200mm and 300mm fabs to PM or wet clean CVD, PECVD, dry etch, PVD and ion implant tools. ScrubPADS® are processed to be extremely low in metals and mobile ions and are available in a wide variety of diamond, silicon carbide and aluminum oxide abrasives to enable safe and efficient wet clean BKMs. ScrubPADS®, used in conjunction with UltraSOLV® Sponges, Wipers, and Swabs, reduce cleaning times, pump down times and contamination levels for critical process tools.

ScrubPADs are now available for ErgoWRENCH and ScrubWRIGHT to speed up cleaning for scratch sensitive and hard to reach areas of Vacuum Chambers.

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Datasheet

Key Features

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Wide grit selection allows for quick removal of process-induced residue from aluminum, stain less steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear.
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The fiber-free construction of ScrubPADs greatly reduces particle levels in cleaned tools.
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By using washed abrasives, harmful ionic residues are minimized.
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Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures.
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Enables the elimination of H2O2 from PMs, which greatly reduces recovery times.
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Clean and unload with UltraSOLV® Sponge for longer life.

ScrubPADS® w/ Diamond Grit w/ 0.078″ Thickness

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Product
Description
Quantity
Details
HT4514D

140 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
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HT4518D

180 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
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HT4522D

220 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4528D

280 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4536D

360 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4536DS

360 Diamond Grit With Slits


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4540D

400 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4580D

800 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4513PD

1350 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4513PDS

1350 Diamond Grit with Slits


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4520PD

2000 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4530PD

3000 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4540PD

4000 Diamond Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample

ScrubPADS® w/ Silicon Carbide (SiC) Grit w/ 0.078″ Thickness

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Product
Description
Quantity
Details
HT4510

100 SiC Grit


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
Placeholder
HT4510S

100 SiC Grit ScrubPAD® w/ Slits


Size: 3" x 4"
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HT4522

220 SiC Grit


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4528

280 SiC Grit


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4528-11

280 SiC Grit


Size: 4 x 6 | .20 x 10 x 15
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
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HT4540

400 SiC Grit


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4540S

400 SiC Grit with Slits


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4560

600 SiC Grit


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4560S

600 SiC Grit with Slits


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4580

800 SiC Grit


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4512P

1200 SiC Grit


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4512PS

1200 SiC Grit with Slits


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4515P

1500 SiC Grit


Size: 3 x 4 | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample

ScrubPADS® w/ Aluminum Oxide (AO) Grit w/ 0.078″ Thickness

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Product
Description
Quantity
Details
HT4580A

800 AO Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4512PA

1200 AO Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample
HT4540PA

4000 AO Grit


Size: 3" x 4" | .20 x 7.6 x 10
Thickness: 0.078"
Quantity/Pack:
10 ScrubPADs
Request a Sample

About Foamtec WCC

Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.

 

Contact Us

Address

6575 IH-35 North
Waco, TX 76705

Phone

(760) 599-7160