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Vacuum Chamber Cleaning Products

Foamtec International Contamination Control Division

Vacuum Chamber Cleaning Products Enable Much Faster PM’s and Reduced Particle Levels

UltraSOLV® Chamber Cleaning products enable Equipment Engineers in the semiconductor industry to quickly and thoroughly clean process by-product from a wide range of vacuum chambers. In 200mm and the most advanced 300mm wafer fabs, equipment wet cleans have been improved in the following manner:



Scotch-Brite™ and related particle contamination have been eliminated from the fab


Hazardous chemicals such as H2O2, IPA, and Acetone have significantly been reduced or eliminated


MiraWIPE® and MiraSAT® improve Post PM particles and first-pass QUAL rates.


MiraSAT® and MiraWIPE's tightly woven microfiber fabric eliminate the risk of fiber scratch defects when cleaning transfer robots, front end modules and end effectors


MiraSAT® and MiraWIPE's excellent particle pickup and absorbency greatly reduce equipment pump down times especially for tools cleaned with Ultrapure Water

UltraSOLV® Chamber Cleaning Products are production proven to improve PM’s for the following process modules:


Plasma Etch - Eliminate Scotch-Brite™, significantly reduce scrubbing time, innovative and safe cleaning of electrostatic chucks, improved PM QUAL rates due to reduced post PM Particles


CVD - Diamond ScrubPADs allow equipment techs to remove process residue much more quickly with less contamination leading to shorter green-to-green times.


Ion Implantation - Elimination of the safety hazards associated with H2O2 and Scotch-Brite™. Significantly reduced PM times due to more efficient scrubbing of process by-product and reduced pump down time.


RTP - Eliminate the use of IPA, MiraWIPE® leaves the chamber dry with no IPA. Reduce PM times and improve particle performance.


CMP - Eliminate Scotch-Brite™, Sahara foam can clean slurry of plastic parts without scratching. Improved PM times and improved particle performance.

Scotch-Brite™ is a trademark of 3M Corporation.


Abrasive Pads and Accessories

Chamber Cleaning Abrasive Pads and Accessories for Equipment Engineers in the semiconductor industry to quickly and thoroughly clean process by-product from a wide range of vacuum chambers.


Microfiber Wipes

The premium cleanroom microfiber wiper designed for ISO Class 1-3 equipment cleaning applications.


Microfiber Swabs

Microfiber cleaning performance brought to the world of swabs. Acetone compatible. 


Presaturated Microfiber Wipes

Foamtec’s MiraSAT wipes are premium presaturated microfiber cleanroom wipers offering the most advanced cleanrooms unsurpassed cleaning performance.


Microfiber Gloves

Microfiber Cleanroom Gloves to Handle Process Chamber Components in Wafer Fabs Running Sub 10nm Nodes.

Tell Us About Your Project

If you're looking for a Foamtec product to fit your specific needs, our team is here to help. 

Our wide selection of Swabs, Wipers, Sponges, Mops and more can be combined to be your turnkey solution for contamination control. If you're in the market for a custom product we're also able to build product direct to your specification. 

Our technical sales managers partner with companies worldwide to provide the best in product and service. Fill out the form today to experience the Foamtec Difference.

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About Foamtec WCC

Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.


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6575 IH-35 North
Waco, TX 76705