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RPS Cleaning Kit

for *AMAT Producer® and MKS Remote Plasma Source (RPS) PMs

The MKS remote plasma source is a workhorse in CVD and ALD process tools that delivers in-situ chamber cleaning. However, particle and process residue buildup within the plasma strike channel can become a particle generator, reducing cleaning efficiency, causing non-uniformity, and degrading source performance.

Introducing the Foamtec RPS Cleaning Kit: Your Defense Against Downtime

Foamtec’s innovative RPS Cleaning Kit provides a comprehensive solution to combat buildup and ensure your MKS remote plasma source operates at peak capacity. Our kit features a powerful two-pronged approach:

  • Long Swab for Focused Cleaning:  This extended-length swab with a specialized cleaning head reaches deep into the vertical channel, meticulously removing residue buildup.
  • Rope Wiper for Complete Cleaning:  The unique, rope-like wiper efficiently cleans the entire channel length, ensuring no area is left untouched.

Advantages

Enhanced Cleaning Efficiency: Remove even stubborn residue buildup for optimal plasma cleaning performance.

Improved Uniformity:  Achieve consistent cleaning across the channel ID surface for superior wafer quality.

Extended Source Lifetime:  Regular cleaning with the RPS Kit promotes optimal source performance and reduces the risk of premature degradation.

Reduced Downtime:  Minimize maintenance intervals and ensure your MKS source remains operational for continued productivity.

Applications

R

Designed to clean AMAT Producer® SE’s and MKS Remote Plasma Source (RPS) Units.

The Foamtec RPS Cleaning Kit: A Wise Investment for Superior Results

Incorporating the Foamtec RPS Cleaning Kit into your MKS remote plasma source maintenance routine can safeguard your investment, optimize cleaning effectiveness, and achieve consistent, high-quality results in your semiconductor fabrication process.

*Producer is a registered trademark of Applied Materials, Inc.

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The Remote Plasma Source (RPS) Cleaning Kit consists of:

• MiraSWAB® with Flexible Tip - 1 Unit
• MiraWIPE® Linear Sponge - 1 Unit
• MiraWIPE® Microfiber Wipe with a String - 1 Unit


Quantity/Pack:
1
Packs/Case:
1

About Foamtec WCC

Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.

 

Contact Us

Address

6575 IH-35 North
Waco, TX 76705