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RPS Cleaning Kit

for *AMAT Producer® PMs

The RPS Cleaning Kit, designed for the *AMAT Producer® SE, significantly enhances cleaning efficiency. It focuses on reducing particles in the Remote Plasma Source (RPS) unit using specialized products, the HT4500-RPS23 kit, includes a MiraSWAB® with Flexible Tip Swab, Linear MiraWIPE® Sponge, and MiraWIPE® with string. These tools are crafted for easy access and effective cleaning of challenging areas like the RPS edge and ignitor.

Advantages

Superior Cleaning Performance: The kit’s advanced tools effectively remove black particle levels, ensuring a cleaner RPS unit.

Minimized Downtime: Streamlined cleaning process reduces tool downtime.

Enhanced Particle Performance: Improved cleaning techniques lead to better particle performance in the AMAT Producer® equipment.

Ease of Use: The kit’s specialized tools allow for easy access to difficult-to-reach areas, making the cleaning process more efficient.

Applications

R

Designed to clean AMAT Producer® SE’s Remote Plasma Source (RPS) Unit.

*Producer is a registered trademark of Applied Materials, Inc.

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The Remote Plasma Source (RPS) Cleaning Kit consists of:

• MiraSWAB® with Flexible Tip - 1 Unit
• MiraWIPE® Sponge - 1 Unit
• MiraWIPE® Microfiber Wipe with a String - 1 Unit


Quantity/Pack:
1
Packs/Case:
1

About Foamtec WCC

Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.

 

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6575 IH-35 North
Waco, TX 76705