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Redefining PM Procedures for Electrostatic Chucks to Improve Post PM Particle Performance and Increase Service Life

by | Mar 22, 2023

In wafer fabs, cleaning electrostatic chucks (ESCs) and wafer pedestals is crucial in vacuum chamber PMs. The ESCs are susceptible to scratch damage, so traditional cleaning tools like *Scotch-Brite™ are not recommended. Instead, customers have adopted ceramic blades and even razor blades to peel off process residue. However, these methods have their limitations and pose EHS issues. Some ESCs are so sensitive that process residue must be removed using a series of fresh gloves as wipers, which is time-consuming. Moreover, none of these methods allows for the complete removal of process residue, especially from 90-degree step-downs on the side of the ESC.

 

Foamtec’s ScrubWRIGHT and ScrubTIP cleanroom abrasive tools combined with MiraWIPE have revolutionized PM practices for electrostatic chucks in wafer fabs. These tools provide a comprehensive solution for cleaning ESCs and wafer pedestals. Foamtec’s ScrubWRIGHT is a handheld abrasive tool that uses a unique diamond abrasive pad specifically designed to remove process residue from ESCs and wafer pedestals without causing any scratches. ScrubTIPS, on the other hand, is a range of abrasive foam-tipped tools that can clean hard-to-reach areas.

 

ScrubWRIGHT and ScrubTIPS offer practical solutions for cleaning ESCs and wafer pedestals, but MiraWIPE provides the final cleaning touch. MiraWIPE is a high-quality cleanroom wipe designed to provide a superior cleaning performance. The wipe’s proprietary microfiber technology ensures that all the process residue is completely removed from the ESCs and wafer pedestals. This technology also ensures that the wipe leaves no fibers or contaminants behind, which could cause contamination during subsequent processing steps.

 

The combination of ScrubWRIGHT, ScrubTIPS, and MiraWIPE has several advantages over traditional cleaning methods:

  1. It saves time and eliminates the need for multiple fresh gloves or razor blades.
  2. It reduces EHS issues associated with conventional cleaning methods.
  3. It ensures the complete removal of process residue from ESCs and wafer pedestals, including the 90-degree step-downs, which are hard to reach using other cleaning methods.
  4. Combining these tools provides a comprehensive solution for cleaning ESCs and wafer pedestals, ensuring that wafer fabrication processes are not compromised due to contamination.

 

In conclusion, Foamtec’s ScrubWRIGHT and ScrubTIPS cleanroom abrasive tools combined with MiraWIPE provide an effective solution for cleaning electrostatic chucks and wafer pedestals in wafer fabs. These tools eliminate the need for traditional cleaning methods, save time, reduce EHS issues, and ensure the complete removal of process residue. Combining these tools provides a comprehensive solution for cleaning ESCs and wafer pedestals, ensuring that wafer fabrication processes are not compromised due to contamination.

ScrubWRIGHT Web Page

https://www.foamtecintlwcc.com/products/vacuum-chamber-cleaning/abrasive-pads-and-accessories/scrubwright

ScrubTIPS Web Page

https://www.foamtecintlwcc.com/products/vacuum-chamber-cleaning/abrasive-pads-and-accessories/scrubtip

MiraWIPE Web Page

https://www.foamtecintlwcc.com/products/cleanroom-wipes/microfiber/mirawipe

For questions or inquiries:

Website: www.foamtecintlwcc.com

Email: contact@foamtecintlwcc.com

 

*Scotch-Brite Brand is a trademark of 3M.