ft-pen Archives | Foamtec WCC

How to Reduce PM Times and Improve Post PM Particle Levels in E-beam Evaporators

by Foamtec | Jan 19, 2023 | cleanroom cleaning, foreign particle contamination, particle control

Electron-Beam evaporation (E-Beam evaporation) and Ion assisted e-beam evaporation are widely used techniques for depositing dense thin films or metals and dielectrics. However, to ensure high-purity films, it is essential to carefully consider the items used to...

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How to Reduce PM Times and Improve Post PM Particle Levels in E-beam Evaporators

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