PAMS Archives | Foamtec WCC

Reducing Post-PM Particle Contamination in Plasma-Assisted Magnetron Sputtering (PAMS) Chambers

by Foamtec WCC | Oct 14, 2025 | Scrub Kits, Semiconductor, vacuum chamber cleaning, Wipers

Why “Clean” Chambers Still Shed Particles After PM PAMS inevitably redeposits metal/oxide/nitride on shields, shutters, and walls; the brittle build-up later cracks and falls. During PM, legacy materials can make things worse: Polyester knit wipers shed microfibers...

Please describe what industry your application most closely relates to:*
Company:*
Title:
First Name:
Last Name:*
Street:*
City:*
Zip/Mailing Code:*
Country:*
State (US):*
Phone:*
Email:*
Please tell us how you found us?
Product of Interest:*

Comments:*

Please describe what industry your application most closely relates to:*
Company:*
Title:
First Name:	maxlength="50">
Last Name:*	maxlength="50" required>
Street:*
City:*
Zip/Mailing Code:*
Country:*
State (US):*
Phone:*
Email:*	required>
Please tell us how you found us?
Product of Interest:*
value="701Qm000007y9u4IAA" /> -->
Comments:*	onblur="commentcheck()" required>

Reducing Post-PM Particle Contamination in Plasma-Assisted Magnetron Sputtering (PAMS) Chambers

Material +

Tip +

Handle Length +

Quantity per pack +

Packs per case +