Cleaning metal etch chambers is one of the most time-consuming and laborious PMs in wafer manufacturing fabs. Metal etch chamber cleaning requires hours of scrubbing while chemical reactions generate hazardous fumes and corrosive fluids throughout the PM. Maintenance...
Now, more than ever, with advances in Moore’s Law becoming ever more expensive, wafer fabs are looking at all areas for cost reductions. One area ripe for review are the costs associated with waste streams from Ion Implant tools in the form of toxic arsenic wastes....
