rps cleaning kit Archives

Don’t Let Buildup Become Your Downfall: Introducing the Foamtec RPS Cleaning Kit for MKS Remote Plasma Sources

by Foamtec WCC | May 17, 2024 | cleanroom swabs, Swabs

We explored the hidden threat of particle and process residue buildup within the plasma strike channel of MKS remote plasma sources. This buildup can significantly impact tool performance, leading to: Decreased cleaning efficiency Non-uniform cleaning Source...

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Don’t Let Buildup Become Your Downfall: Introducing the Foamtec RPS Cleaning Kit for MKS Remote Plasma Sources

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