vacuum chamber pm Archives

Enhancing E-beam Evaporators Cleaning during the PM with the Foamtec solution using ScrubPAD, ScrubDISK and ScrubBELT

by Foamtec | Aug 2, 2023 | cleanroom cleaning, foreign particle contamination, particle control

E-beam evaporators play a crucial role in semiconductor manufacturing, providing precise and controlled deposition of thin films. However, the deposition process often accumulates process by-products on the E-beam source or E-gun surfaces, posing challenges during...

Utilizing Foamtec ScrubPADS and Advanced Microfiber Cleanroom Wipers to Improve Safety and Cleanliness on Ion Implant Wet Cleans

by Foamtec | Jun 20, 2023 | foreign particle contamination, particle control

Ion implanters are vital tools in the semiconductor manufacturing industry, and regular cleaning is essential to maintain their performance. However, wet cleaning with hydrogen peroxide (H2O2) and *Scotch-Brite™ can pose significant fire and health hazards when used...

Redefining PM Procedures for Electrostatic Chucks to Improve Post PM Particle Performance and Increase Service Life

by Foamtec | Mar 22, 2023 | cleanroom cleaning, cleanroom wipes, foreign particle contamination, particle control

In wafer fabs, cleaning electrostatic chucks (ESCs) and wafer pedestals is crucial in vacuum chamber PMs. The ESCs are susceptible to scratch damage, so traditional cleaning tools like *Scotch-Brite™ are not recommended. Instead, customers have adopted ceramic blades...

How to Improve Vacuum Chamber PM’s in Semiconductor Fabs

by Foamtec | Feb 27, 2023 | cleanroom cleaning, foreign particle contamination, particle control, Semiconductor

Semiconductor fabs are among the most demanding industrial environments, where particle control and productivity are critical factors in achieving the highest quality products. Any contamination, whether it be from particles or byproducts, can result in defects, yield...

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Enhancing E-beam Evaporators Cleaning during the PM with the Foamtec solution using ScrubPAD, ScrubDISK and ScrubBELT

Utilizing Foamtec ScrubPADS and Advanced Microfiber Cleanroom Wipers to Improve Safety and Cleanliness on Ion Implant Wet Cleans

Redefining PM Procedures for Electrostatic Chucks to Improve Post PM Particle Performance and Increase Service Life

How to Improve Vacuum Chamber PM’s in Semiconductor Fabs

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