Redefining PM Procedures for Electrostatic Chucks to Improve Post PM Particle Performance and Increase Service Life
In wafer fabs, cleaning electrostatic chucks (ESCs) and wafer pedestals is crucial in vacuum chamber PMs. The ESCs are susceptible to scratch damage, so traditional cleaning tools like *Scotch-Brite™ are not recommended. Instead, customers have adopted ceramic blades...
How Advanced Cleanroom Wipers can Reduce Random Defects in Wafer Fabs
The semiconductor industry has revolutionized how we live and work by enabling technological advancements. The fabrication process of chips for automotive, RF, aerospace and medical applications requires extreme precision and cleanliness to ensure high yields and...
Improving Vacuum Chamber Cleanliness by Removing Particles Entrapped in Lift Pin Ports
As semiconductor technology advances, the need for cleanliness in wafer fabs becomes more and more critical. With geometries becoming smaller and smaller, any particle or contamination can cause serious issues. Eliminating particle contamination entrapped in Lift-off...
