wafer contact surfaces Archives

How to Minimize Cross Contamination of Components Assembled into Wafer Process Chambers During Wet Cleans

by Foamtec | Jan 13, 2023 | cleanroom cleaning, foreign particle contamination, particle control, Semiconductor

When it comes to running semiconductor processes in vacuum chambers, maintaining equipment uptime is crucial for productivity. However, one major challenge that fabs face is the problem of “glove prints” or ghost prints on components such as liners, quartz...

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How to Minimize Cross Contamination of Components Assembled into Wafer Process Chambers During Wet Cleans

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