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Redefining PM Procedures for Electrostatic Chucks to Improve Post PM Particle Performance and Increase Service Life

Redefining PM Procedures for Electrostatic Chucks to Improve Post PM Particle Performance and Increase Service Life

In wafer fabs, cleaning electrostatic chucks (ESCs) and wafer pedestals is crucial in vacuum chamber PMs. The ESCs are susceptible to scratch damage, so traditional cleaning tools like *Scotch-Brite™ are not recommended. Instead, customers have adopted ceramic blades...