wafer fabrication Archives

Redefining PM Procedures for Electrostatic Chucks to Improve Post PM Particle Performance and Increase Service Life

by Foamtec | Mar 22, 2023 | cleanroom cleaning, cleanroom wipes, foreign particle contamination, particle control

In wafer fabs, cleaning electrostatic chucks (ESCs) and wafer pedestals is crucial in vacuum chamber PMs. The ESCs are susceptible to scratch damage, so traditional cleaning tools like *Scotch-Brite™ are not recommended. Instead, customers have adopted ceramic blades...

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Redefining PM Procedures for Electrostatic Chucks to Improve Post PM Particle Performance and Increase Service Life

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