As technology advances, the geometries of lithography processes have declined by several orders of magnitude over the past 25 years. However, one area that has remained unchanged is the cleaning process of litho tracks. These tracks are used to coat, bake, and develop...
Defects in 200mm & 300mm litho modules are a common, yet costly issue. A major source of defects in lithography modules are fibers & particulates including resist particles that have been left in the track. Contamination that migrates to the scanner or stepper...
