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Ion Implant Source Bushing Preventive Maintenance

Sahara polyurethane sponges enable equipment techs to quickly remove process by-product from ion implant bushings while avoiding scratch and abrasion damage of the polymer coating.

  • Products Used: Sahara Sponge, MiraWIPE and 3% H2O2
  • Part Number: HS4855, HT5790S

Wet Clean Advantages

1. Environmental Health & Safety – Safely and quickly remove ion implant by-product with 3% H2O2 reducing operator exposure to arsenic, phosphine and boron process by-product. Eliminate fire and smoke hazards associated with Scotch-Brite
2. Contamination Control – Eliminate metallic adders and particle shedding associated with Scotch-Brite
3. Process Improvements – Eliminate post-pm arcing associated with abrasion damage to the polymer coating.
4. Cost of Ownership – Dramatically increase source bushing service life.

About Foamtec WCC

Foamtec's mission is to enable contamination control professionals to improve particle control in clean rooms by solving surface contamination challenges. The Wilshire Contamination Control Division of Foamtec International supplies clean room mops, foam swabs, microfiber swabs, foam wipers, microfiber wipers, UltraSOLV® ScrubPADS to address clean room cleaning and the critical cleaning of process equipment.


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6575 IH-35 North
Waco, TX 76705