Vacuum Chamber Cleaning

Reduce particle contamination and wiping costs in vacuum chamber cleaning applications.
Advanced 300mm wafer fabs suffer unnecessary productivity and yield losses due to the use of standard cleanroom polyester wipers. MiraWIPE® is the only sealed-edge cleanroom microfiber wiper designed specifically for cleaning process equipment in wafer fabs. The snag free, abrasion resistant, absorbent microfiber fabric enables technicians to thoroughly and efficiently clean particulates and process contamination from wafer contact surfaces.